Contents

Mitsubishi MH11H05B0LNA Control Module User's Manual PDF

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Summary of Content for Mitsubishi MH11H05B0LNA Control Module User's Manual PDF

MELSEC iQ-R Laser Displacement Sensor Control Module User's Manual (Sensor Head)

-MH11H01A0SNA -MH11H01A0LNA -MH11H01A1SNA -MH11H01A1LNA -MH11H01A2SNA -MH11H01A2LNA -MH11H03B0SNA -MH11H03B0LNA -MH11H05B0SNA -MH11H05B0LNA -MH11H05C0SNA -MH11H05C0LNA -MH11H08B0SNA -MH11H08B0LNA -MH11H08C0SNA -MH11H08C0LNA -MH11H11B0SNA -MH11H11B0LNA -MH11H35C3SNA -MH11H11C0LNA -MH11H11C0SNA -MH11H35B0LNA -MH11H35B0SNA -MH11H35C0LNA -MH11H35C0SNA -MH11H35C3LNA

SAFETY PRECAUTIONS (Read these precautions before using this product.) This product is intended to detect an object and does not have the control function to ensure safety such as accident prevention. Do not use this product as a safeguard that senses the presence of a person. Doing so may result in an accident due to an incorrect output or malfunction. To protect the human body, use a product that complies with local laws and standards such as OSHA, ANSI, and IEC. Before using this product, please read this manual and the relevant manuals carefully and pay full attention to safety to handle the product correctly. The precautions given in this manual are concerned with this product only. For the safety precautions of the programmable controller system, refer to the MELSEC iQ-R Module Configuration Manual. In this manual, the safety precautions are classified into two levels: " WARNING" and " CAUTION".

Under some circumstances, failure to observe the precautions given under " CAUTION" may lead to serious consequences. Observe the precautions of both levels because they are important for personal and system safety. Make sure that the end users read this manual and then keep the manual in a safe place for future reference.

WARNING Indicates that incorrect handling may cause hazardous conditions, resulting in death or severe injury.

CAUTION Indicates that incorrect handling may cause hazardous conditions, resulting in minor or moderate injury or property damage.

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[Precautions for Using Laser Products]

WARNING The laser products use semiconductor laser light sources. When handling laser products, observe the

following because human access to laser radiation may result in injury. (1) Do not disassemble the laser products. Doing so may result in exposure to laser radiation. (2) Shut off the external power supply (all phases) to stop laser emission before replacing a failed

laser product or changing the layout. Observe the following handling precautions for the laser products in each class.

(1) Class 3R laser products Do not aim the laser beam at people. Do not directly look at or come in contact with the laser beam and its reflection from a specular

surface (such as a mirror). In addition, never look at the beam and its reflection through optical instruments (such as a microscope and a telescope).

Shorten the beam paths as much as possible to prevent diffusion of laser beams. Terminate the laser beams at the end of their paths by diffusely reflecting materials of appropriate reflectivity and thermal properties or by absorbers.

Locate the beam path above or below the eye level. Wearing protective eyewear is recommended when handling the laser products.

Install the laser products carefully so that the laser beam is not unintentionally reflected from specular surfaces.

(2) Class 2 laser products Do not aim the laser beam at people. Do not stare into the laser beam and its reflection from specular surfaces. To prevent exposure to laser radiation (specularly or diffusely reflected laser beams), install a

protective enclosure with an appropriate reflectance. Locate the beam path above or below the eye level.

(3) Class 1 laser products Do not stare into the laser beam and its reflection from specular surfaces.

[Design Precautions]

[Design Precautions]

[Installation Precautions]

[Installation Precautions]

WARNING Provide safety measures such as a dual safety mechanism when the module is used for applications

that have the possibility of causing physical injury or serious damage. If a communication cable is disconnected, the network may be unstable, resulting in a communication

failure of multiple stations. Configure an interlock circuit in the program to ensure that the entire system will always operate safely even if communications fail. Incorrect output or malfunction due to a communication failure may result in an accident.

CAUTION Do not use the laser displacement sensor outside of its specifications (such as ratings or

environments). Doing so may result in overheating or smoke. Do not install the control lines or communication cables together with the main circuit lines or power

cables. Keep a distance of 100mm or more between them. Failure to do so may result in malfunction due to noise.

Do not power off the programmable controller or reset the CPU module while the settings are being written. Doing so will make the data in the flash ROM and SD memory card undefined. The values need to be set in the buffer memory and written to the flash ROM and SD memory card again. Doing so also may cause malfunction or failure of the module.

Do not disassemble or modify this product. Doing so may cause failure, malfunction, injury, or a fire. Clamp cables securely with the terminal screws. Incomplete connections may cause overheating or

smoke. Do not touch any terminal while power is on. Doing so will cause electric shock or malfunction. Do not open the covers on the back and the bottom of the product. Doing so may cause malfunction

or failure.

WARNING Shut off the external power supply (all phases) used in the system before mounting or removing the

module. Failure to do so may result in electric shock or cause the module to fail or malfunction.

CAUTION Use this product in an environment that meets the general specifications in this manual. Failure to do

so may result in electric shock, fire, malfunction, or damage to or deterioration of the product. When using the programmable controller in an environment of frequent vibrations, fix the module with

a screw. Do not directly touch any conductive parts of connectors on the modules. Doing so can cause

malfunction or failure of the module.

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[Wiring Precautions]

[Wiring Precautions]

WARNING Shut off the external power supply (all phases) used in the system before installation and wiring.

Failure to do so may result in electric shock or cause the module to fail or malfunction.

CAUTION Individually ground the FG and LG terminals of the programmable controller with a ground resistance

of 100 ohms or less. Failure to do so may result in electric shock or malfunction. Check the rated voltage and signal layout before wiring to the module, and connect the cables

correctly. Connecting a power supply with a different voltage rating or incorrect wiring may cause fire or failure.

Securely connect the connector to the module. Poor contact may cause malfunction. Do not install the control lines or communication cables together with the main circuit lines or power

cables. Keep a distance of 100mm or more between them. Failure to do so may result in malfunction due to noise.

Place the cables in a duct or clamp them. If not, dangling cables may swing or inadvertently be pulled, resulting in malfunction or damage to modules or cables. In addition, the weight of the cables may put stress on modules in an environment of strong vibrations and shocks. Do not clamp the extension cables with the jacket stripped. Doing so may change the characteristics of the cables, resulting in malfunction.

Check the interface type and correctly connect the cable. Incorrect wiring (connecting the cable to an incorrect interface) may cause failure of the module and external device.

When disconnecting the cable from the module, do not pull the cable by the cable part. For the cable with connector, hold the connector part of the cable.

Prevent foreign matter such as dust or wire chips from entering the module. Such foreign matter can cause a fire, failure, or malfunction.

Do not apply the 24VDC power before connecting a sensor head. If the power is applied before wiring, normal data transmission is not guaranteed.

[Startup and Maintenance Precautions]

[Startup and Maintenance Precautions]

[Operating Precautions]

[Disposal Precautions]

WARNING Do not touch any terminal while power is on. Doing so will cause electric shock or malfunction. Shut off the external power supply (all phases) used in the system before cleaning the module or

retightening the connector screws or module fixing screws. Failure to do so may result in electric shock.

For the operating status of each station after a communication failure, refer to manuals relevant to the network. Incorrect output or malfunction due to a communication failure may result in an accident.

CAUTION Do not disassemble or modify the modules. Doing so may cause failure, malfunction, injury, or a fire. Use any radio communication device such as a cellular phone or PHS (Personal Handy-phone

System) more than 25cm away in all directions from the programmable controller. Failure to do so may cause malfunction.

Shut off the external power supply (all phases) used in the system before mounting or removing the module. Failure to do so may cause the module to fail or malfunction.

Startup and maintenance of a control panel must be performed by qualified maintenance personnel with knowledge of protection against electric shock. Lock the control panel so that only qualified maintenance personnel can operate it.

Before handling the module, touch a conducting object such as a grounded metal to discharge the static electricity from the human body. Failure to do so may cause the module to fail or malfunction.

CAUTION When using the product to control the system, read relevant manuals carefully and ensure the safety

before operation. Incorrect change or modification may cause system malfunction, damage to the machines, or accidents.

Do not power off the control module while the settings are being written. Doing so will make the data in the flash ROM undefined. The values need to be written to the flash ROM again. Doing so can cause malfunction or failure of the module.

CAUTION When disposing of this product, treat it as industrial waste.

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[Transportation Precautions]

CAUTION The halogens (such as fluorine, chlorine, bromine, and iodine), which are contained in a fumigant

used for disinfection and pest control of wood packaging materials, may cause failure of the product. Prevent the entry of fumigant residues into the product or consider other methods (such as heat treatment) instead of fumigation. The disinfection and pest control measures must be applied to unprocessed raw wood.

CONDITIONS OF USE FOR THE PRODUCT (1) Mitsubishi's laser displacement sensor must be used in applications which do not lead to serious accidents even in

cases where failure/nonconformity was unlikely to occur in the laser displacement sensor, as well as, application which execute backup and failsafe functions in systems through external devices when a failure or defect has occurred.

(2) Mitsubishi's laser displacement sensor was designed/manufactured as a general-purpose product which was designed for use in general industries, etc. Accordingly, the applications of Mitsubishi's laser displacement sensor shall be exempt for usage in special applications such as devices and systems as stated below. In the unlikely event that it is used, we bare no responsibility (includes, but is not limited to debt defaults, defective warranty, QA, illegal acts, and product liabilities) for the quality performance, and safety of Mitsubishi's laser displacement sensor. Large applications which greatly affect the public such as, nuclear power plants operated by each power company and

other nuclear power plants Application which request Mitsubishi to construct special QA structures such as railway companies and government

offices. Application such as aerospace, medicine, railway, combustion-fuel system, passenger cars, manned transfer

equipment, entertainment devices, and safety devices that are expected to greatly affect lives, the body and properties

Mitsubishi's information desk should be contacted for more information as the laser displacement sensor may be applicable at the discretion of Mitsubishi, on the condition that the application is strictly limited and special qualities (exceeding the general specifications, etc.) are not required even in the above applications.

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INTRODUCTION Thank you for purchasing the Mitsubishi Electric MELSEC iQ-R series programmable controllers. This manual describes the installation methods, specifications, and maintenance and inspection of the relevant products listed below. Before using this product, please read this manual and the relevant manuals carefully and develop familiarity with the functions and performance of the MELSEC iQ-R series programmable controller to handle the product correctly. Please make sure that the end users read this manual.

Relevant products Sensor head MH11H01A0SNA, MH11H01A1SNA, MH11H01A2SNA, MH11H03B0SNA, MH11H05B0SNA, MH11H05C0SNA, MH11H08B0SNA, MH11H08C0SNA, MH11H11B0SNA, MH11H11C0SNA, MH11H35B0SNA, MH11H35C0SNA, MH11H35C3SNA, MH11H01A0LNA, MH11H01A1LNA, MH11H01A2LNA, MH11H03B0LNA, MH11H05B0LNA, MH11H05C0LNA, MH11H08B0LNA, MH11H08C0LNA, MH11H11B0LNA, MH11H11C0LNA, MH11H35B0LNA, MH11H35C0LNA, MH11H35C3LNA

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CONTENTS SAFETY PRECAUTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1 CONDITIONS OF USE FOR THE PRODUCT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7 INTRODUCTION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8 RELEVANT MANUALS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10 TERMS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 GENERIC TERMS AND ABBREVIATIONS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

CHAPTER 1 BEFORE USING THE PRODUCT 12 1.1 Correct Usage Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 1.2 Handling of Laser Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15 1.3 Accessories and Products Sold Separately . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 1.4 Part Names. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 1.5 Installation Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

CHAPTER 2 SPECIFICATIONS 38 2.1 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 2.2 Sensor Head Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

10mm type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 30mm type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 50mm type (Class 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 50mm type (Class 3R). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 85mm type (Class 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 85mm type (Class 3R). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 110mm type (Class 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46 110mm type (Class 3R) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 350mm type (Class 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48 350mm type (Class 3R). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49 8mm type (Class 1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 15mm type (Class 1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

2.3 ND Filter Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

CHAPTER 3 MAINTENANCE AND INSPECTION 54 3.1 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54 3.2 Inspection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

CHAPTER 4 TROUBLESHOOTING 56

APPENDICES 58 Appendix 1 External Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58 Appendix 2 Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 Appendix 3 How to Confirm Serial Number and Function Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70 Appendix 4 Export Regulations by Japanese Government . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71

INDEX 72

REVISIONS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .74 WARRANTY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .75 TRADEMARKS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .76

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RELEVANT MANUALS

e-Manual refers to the Mitsubishi Electric FA electronic book manuals that can be browsed using a dedicated tool. e-Manual has the following features: Required information can be cross-searched in multiple manuals. Other manuals can be accessed from the links in the manual. The hardware specifications of each part can be found from the product figures. Pages that users often browse can be bookmarked. Sample programs can be copied to an engineering tool.

Manual name [manual number] Description Available form

MELSEC iQ-R Laser Displacement Sensor Control Module User's Manual (Sensor Head) [SH-082023ENG] (this manual)

Precautions for using the sensor head, installation methods, specifications, and maintenance and inspection

Print book

e-Manual PDF

MELSEC iQ-R Laser Displacement Sensor Control Module User's Manual (Startup) [SH-082017ENG]

Specifications, procedures before operation, system configuration, wiring, and operation examples of the laser displacement sensor control module

Print book

e-Manual PDF

MELSEC iQ-R Laser Displacement Sensor Control Module User's Manual (Application) [SH-082019ENG]

Functions, parameter settings, timing charts, troubleshooting, I/O signals, and buffer memory of the laser displacement sensor control module

Print book

e-Manual PDF

TERMS Unless otherwise specified, this manual uses the following terms.

GENERIC TERMS AND ABBREVIATIONS Unless otherwise specified, this manual uses the following generic terms and abbreviations.

Term Description Engineering tool A tool used for setting up programmable controllers, programming, debugging, and maintenance

Measurement center distance The distance from the light emitting part of the sensor head to the center of the measurement range.

Measurement range The range where the resolution and linearity are guaranteed, and the displacement can be measured.

Generic term/abbreviation Description Control module An abbreviation for the MELSEC iQ-R laser displacement sensor control module

Laser displacement sensor The generic term for the sensor head and the control module

F.S. An abbreviation for Full Scale. When the measurement range is 5mm, F.S. becomes 10mm.

Sensor head An abbreviation for the laser displacement sensor MH11 sensor head

Setting tool An abbreviation for the laser displacement sensor MH11 SettingTool Version 2

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1 BEFORE USING THE PRODUCT This chapter describes the installing method and connection method of the sensor head.

1.1 Correct Usage Method Regarding execution and use of the sensor head, be aware of the following.

Installation environment Do not install the product in the following conditions. Where the ambient temperature, ambient humidity, or ambient illuminance of light receiving surface is beyond the range of

specifications ( Page 12 Usage environment) Where dew condensation occurs due to rapid temperature change In an atmosphere of corrosive gas or flammable gas Where the product is exposed to dust, iron powder, and salt In an atmosphere which is likely to be exposed to organic solvent such as benzene, thinner, or alcohol, or to strong alkaline

materials such as ammonia or sodium hydroxide Where heavy vibration or impact is applied Where direct sunlight is received Where water, oil, or chemicals splashes Where load is applied to the product

Usage environment Ambient temperature Use the sensor head within the specifications range of 0 to 45. ( Page 38 SPECIFICATIONS) Store the product within the ambient temperature range of -20 to 70. The life of the semiconductor laser depends on the ambient temperature during use. When using the product near a heat source, take measures to lower the ambient temperature of the sensor head as possible. Install the sensor head on a device having good heat radiation because the sensor head itself emits heat.

Precautions For MH11H110NA, when installing two sensor heads in parallel at a 20mm or less interval, install each sensor head on an aluminum or iron plate having a 200 or more surface area.

Ambient humidity Use the controller within a range of 35% to 85% (RH). Do not, however, use the controller in places where a drastic temperature change may result in dew condensation.

Light receiving surface ambient illuminance Use the system with illuminance of 3000lx or less at light receiving surface using an incandescent lamp.

1 BEFORE USING THE PRODUCT 1.1 Correct Usage Method

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Environment Water, oil, or fingerprints on the light emitting part and light receiving part of a sensor head refracts light. Dust and dirt on

them block light. Keep them clean at all times. When cleaning these parts, wipe them off using a soft lint-free cloth or lens cleaning paper.

Install the sensor head so that ambient light such as sunlight or light with the same wavelength as laser beam does not enter the light receiver. If high accuracy is required, install a light shielding plate or the like on the sensor head.

Do not use the product in dusty places or that exposed to flammable or corrosive gases, droplet, direct sunlight, severe vibration, or impact.

Protective structure Although the sensor head is waterproof, the control module and connectors are not structurally dustproof, waterproof, or corrosion-resistant. Therefore, measurement underwater or in the rain is not allowed. Be aware of the usage environment.

Warming up time Allow at least 30 minutes of warming up after emitted laser beam from a sensor head to ensure the performance of the sensor head.

Measures to reduce noise Install the product as far away as possible from noise source such as high-voltage lines, high-voltage device, power lines,

power device, machines which generate a large starting and stopping surge, welding machines, and inverter motor. Install the product as far away as possible from a wireless device that has a transmitter, such as an amateur radio device. Do not run the sensor head cable along (bundled in parallel) with other wirings. Keep it at least 100mm away from other

wires. Run the cable so that it is separate from high voltage and power circuit lines. If it is necessary to run the cable in parallel with them, shield the cable by running it through a grounded electrical conduit.

1 BEFORE USING THE PRODUCT 1.1 Correct Usage Method 13

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Connecting Connector Turn off the power of the programmable controller before connecting or disconnecting the connectors and any other

connections. When connecting or disconnecting the sensor head, be sure to hold the connector part of the sensor head cable not to

apply extra force to the cable. Be careful not to touch the terminals of disconnected connectors or to let foreign objects get in disconnected connectors. Be careful not to apply force to around the connectors of sensor head cable and extension cable for sensor head. Do not

bend the cables near connectors of the sensor head. Doing so causes disconnection of the cables. Fit the connector of the sensor head cable to the plug-in side of the connector.

Sensor head cable Do not pull the cable using a force 29.4N or more when routing the cable with the sensor head and control module fixed.

Doing so may cause disconnection of the cable. At least 20mm is required from the cable connection to the bend. The bending radius must be 30mm or more.

When moving the sensor head during operation, make sure that the cable is not bent while moving it.

Extension cable for sensor head Use only one extension cable for sensor head for connection between one sensor head and a controller. When moving the sensor head during operation, use the replaceable extension cable for the bending part and movable

part. The bending radius of the extension cable must be 30mm or more for the fixed part, and 60mm or more for the movable part. Do not apply tensile stress to the cable.

When a 30m extension cable is used, an automatic head adjustment error, a head system failure, a measurement alarm, or a measurement value destabilization may occur due to noise or ambient light. In such a case, check that the following items and take actions. When using the 30m extension cable, do not use the received light intensity data and received light intensity waveform data for the judgment processing.

Item Action Reference Automatic head adjustment error Use the protective equipment such as a laser

protective window to prevent the ambient light from coming into the light receiving part.

Take measures to reduce noise to use the sensor head.

Head system failure Take measures to reduce noise to use the sensor head.

Measurement alarm Turn on "Alarm output delay" and increase the number of the alarm output delay times.

Take measures to reduce noise to use the sensor head.

For details on the "Alarm output delay" and "Alarm delay times", refer to the following. MELSEC iQ-R Laser Displacement Sensor Control Module User's Manual (Application)

Measurement value destabilization Increase the number of the moving average times.

Use the median filter. Set the "Measurement value output at alarm" to

"Hold last value". Take measures to reduce noise to use the

sensor head.

For details on the number of moving average times, median filter, and measurement value output at alarm, refer to the following. MELSEC iQ-R Laser Displacement Sensor Control Module User's Manual (Application)

R30mm or more

20mm or more

1 BEFORE USING THE PRODUCT 1.1 Correct Usage Method

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1.2 Handling of Laser Products

JIS/IEC/GB A semiconductor laser is used as the beam source of the sensor. The laser class is classified based on the JIS (JIS C 6802: 2014), IEC (IEC 60825-1: 2014), and GB standards (GB 7247.1: 2012).

*1 MH11H01A2NA: 0.3mW

Before handling laser products, read "Precautions for using laser products" in safety precautions carefully.

Caution Please consult your local Mitsubishi representative if the product breaks down. Do not use the product in a way other than specified in this manual. Users may be exposed to hazardous laser radiation if

the device is controlled or adjusted in procedures not specified in this manual. Before use, carefully read the content of the warning labels shown below. The warning label is posted on the side surface of

the sensor head. Use the warning label including in the sensor head packaging as needed.

Class Maximum output

Wavelength Model name

1 0.1mW*1 658nm MH11H01ANA

2 1mW 658nm MH11H03B0NA, MH11H05B0NA, MH11H08B0NA, MH11H11B0NA, MH11H35B0NA

3R 5mW 658nm MH11H05C0NA, MH11H08C0NA, MH11H11C0NA, MH11H35CNA

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products 15

16

Warning label 10mm type (MH11H01A0SNA, MH11H01A0LNA)

[Label position]

30mm type (MH11H03B0SNA, MH11H03B0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products

1

50mm type (MH11H05B0SNA, MH11H05B0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products 17

18

50mm type (MH11H05C0SNA, MH11H05C0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products

1

85mm type (MH11H08B0SNA, MH11H08B0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products 19

20

85mm type (MH11H08C0SNA, MH11H08C0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products

1

110mm type (MH11H11B0SNA, MH11H11B0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products 21

22

110mm type (MH11H11C0SNA, MH11H11C0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products

1

350mm type (MH11H35B0SNA, MH11H35B0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products 23

24

350mm type (MH11H35C0SNA, MH11H35C0LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products

1

350mm type (MH11H35C3SNA, MH11H35C3LNA)

[Label position]

Japanese/English

Korean/Chinese

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products 25

26

8mm type (MH11H01A1SNA, MH11H01A1LNA)

15mm type (MH11H01A2SNA, MH11H01A2LNA)

[Label position] MH11H01A1SNA, MH11H01A1LNA MH11H01A2SNA, MH11H01A2LNA

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products

1

Preventive measures against damage caused by laser light When using this product, each country should observe related laws and regulations of its own country to prevent damage caused by laser light. For Japan, under the Industrial Safety and Health Act, the detailed safety preventive measures for operations handling laser equipment other than that of class 1 and 2 and operations that are exposed to laser light are established in "Preventive measures against damage caused by laser light". The following lists the measure standards for each class of laser equipment. : Required, : Optional

Measure Description Class of laser equipment

4 3B 3R*1 2M, 1MInvisible Visible

Appointment of administrators of laser equipment Appoint controllers of laser equipment from the workers who have sufficient knowledge and experience with laser equipment handling and laser light prevention.

Controlled area (off-limits area with a sign) Separate the off-limits areas from other areas and indicate them with signs. Allow only authorized personnel to enter there.

Laser equipment

Laser light path Position of light path

Set the light path avoiding the eye height of the workers.

Appropriate design of light path and light blocking

Make the optical path as short as possible to minimize the number of bend times and block the light as much as possible without crossing the optical path and walking path.

Appropriate termination of light

Terminate the light path with a diffuse reflector or an absorber with appropriate reflectance and heat resistance.

*2

Key control A structure activated by using a key or others

Emergency stop switch or other devices

Emergency stop switch

An emergency stop switch which immediately stops laser light emission

Warning device A warning device, such as an automatic indicator, which enables prompt check of laser light

Shutter A shutter which avoids accidental laser emission from a laser emission aperture

Interlock system or other systems Stop laser emission automatically when a controlled area is open or a light path is unblocked.

Indication of laser emission aperture

Display the indication at the laser light emission aperture.

Work management, health management, and other managements

Operating position Position which is as far as possible from laser light

Measures in adjusting the optical system

Minimalize the laser light output when adjusting the optical system.

Protective gear Safety goggles Wear effective safety goggles depending on the type of the laser light.

Work clothes with little skin exposure

Wear work clothes with as little skin exposure as possible.

Use of flame- retardant materials

Wear clothes made of flame-retardant materials (in particular, chemical fibers which melt and turn into beads are not suitable).

Inspection and maintenance Perform start-up inspection, periodic inspection, and maintenance.

Safety and health education Perform education when hiring workers, reassigning workers, and changing laser equipment.

Healthcare Examination of anterior eye part (cornea and crystalline lens)

Perform examination of anterior eye part along with a visual acuity examination when hiring or reassigning workers.

Examination of the ocular fundus

Perform examination of ocular fundus along with a visual acuity examination when hiring or reassigning workers.

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products 27

28

*1 Visible light indicates the light with wavelength of 400 to 700nm. Invisible light indicates the light with a wavelength range outside the wavelength range of visible light.

*2 Measures need to be taken at the termination of the light path for the products from which laser lights are output in parallel.

For details on "Preventive measures against damage caused by laser light", refer to the website of the Ministry of Health, Labour and Welfare.

Others Indication Administrator of laser equipment

Put the name of the laser equipment administrator to an easily viewable place.

Hazardous nature and harmful effects, and precautions

Put the indications of hazardous nature, harmful effects, and precautions of laser light to an easily viewable place.

Installation of laser equipment

Put a sign of laser equipment to an easily viewable place.

Indication of high-voltage parts of laser equipment

Put a sign of high-voltage parts and take measures for electrical shock prevention.

Prohibition of bringing hazardous materials

Prohibit the bringing of explosive or flammable materials.

Measures against hazardous gases and dust

Measures established by the Japanese Industrial Safety and Health Act

Medical examination and treatment of workers who may have been affected by laser light

Prompt medical examination and treatment

Measure Description Class of laser equipment

4 3B 3R*1 2M, 1MInvisible Visible

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products

1

FDA Export to the United States When mounting the product on equipment and machinery, and exporting to the United States, it is subject to the laser regulation standards at the U.S. FDA (Food and Drug Administration). The FDA standard PART1040 (Performance Standards for Light-Emitting Products) was established to prevent beforehand the occurrence of damage to users of laser products. In this standard, the regulation classifies laser products according to the level of hazard, and provides the safety measures for classes. Refer to the sensor head specifications (light source). ( Page 39 Sensor Head Specifications)

FDA-compliant product The laser displacement sensor MH11 sensor heads are all FDA-compliant products. Laser classes are classified according to the FDA Laser Notice No.50 and complied with IEC 60825-1.

Label display A warning label based on FDA standards is attached on this product. For the warning label and label position, refer to the following. ( Page 16 Warning label)

1 BEFORE USING THE PRODUCT 1.2 Handling of Laser Products 29

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1.3 Accessories and Products Sold Separately

Accessory In the sensor head packaging, the following items are included. Before using the product, check that all items are included.

MH11H01ANA

MH11HB0NA

MH11HCNA

If the attached label is hidden when the sensor head is installed in the device, attach the enclosed laser warning label near the light emitting part.

When MH11HB0NA or MH11HCNA is used in a Chinese- or Korean-speaking region, attach the Chinese/Korean laser warning label.

ND filter (sold separately) The following shows the recommended ND filter. MH11F98 ( Page 53 ND Filter Specifications)

Item Quantity Sensor head 1

Laser warning label (written in Japanese, English, Chinese, and Korean) 1

"Before Using the Product" (document) 1

Item Quantity Sensor head 1

Laser warning label (written in Japanese and English) 1

Laser warning label (written in Chinese and Korean) 2

"Before Using the Product" (document) 1

Item Quantity Sensor head 1

Laser warning label (written in Japanese and English) 2

Laser warning label (written in Chinese and Korean) 2

"Before Using the Product" (document) 1

1 BEFORE USING THE PRODUCT 1.3 Accessories and Products Sold Separately

1

Extension cable for sensor head (sold separately) Extension cable for sensor head includes the following products. (All the cables are bending resistant.)

Model name Remarks MH11C20EX Length: 2m, Weight: Approx. 0.2kg

MH11C50EX Length: 5m, Weight: Approx. 0.4kg

MH11C100EX Length: 10m, Weight: Approx. 0.7kg

MH11C200EX Length: 20m, Weight: Approx. 1.4kg

MH11C300EX Length: 30m, Weight: Approx. 2.0kg

1 BEFORE USING THE PRODUCT 1.3 Accessories and Products Sold Separately 31

32

1.4 Part Names

No. Item Description (1) Laser radiation indicator (LASER ON) Laser emission status is displayed.

On: Laser emission (green) Off: Laser stop

Take safety measures according to the laser classes. A laser beam is emitting when the laser radiation indicator is on. ( Page 27 Preventive measures against damage caused by laser light)

(2) Measurement range indicator (RANGE) Measurement value status is displayed. On: Around the measurement center (yellow) Flashing: Within the measurement range (yellow) Off: Outside the measurement range

A measurement range indicator (RANGE) of the sensor head that is not specified in output selection turns off.

(3) Light emitting part Emits a laser beam.

(4) Light receiving part Receives light reflected from the measurement object.

(5) Warning label Shows the laser radiation position. Be aware of the description.

(1) (3) (5)

(4)

(2)

1 BEFORE USING THE PRODUCT 1.4 Part Names

1

1.5 Installation Method Before installing the sensor head, check the installation environment. (Page 12 Correct Usage Method) With screw holes in two locations on the sensor head, use M5 screws to firmly fix the head in place. The user is asked to provide M5 screws for installing.

Precautions Set the tightening torque to 1.2Nm or less. The two screw holes are both 10mm deep and not through holes. Select screws with awareness of the screw length.

Installation direction For more accurate measurement, and for more stable measurement, install the sensor head in the directions shown below in relation to the measurement object.

Direction in relation to a moving object When there are differences in materials or color When performing measurement of a moving measurement target object with extremely different materials and colors, the sensor head can be installed in the direction shown below to hold the measurement errors to a minimum.

Measurement of a rotating target object When performing measurement of a rotating target object, the sensor head can be installed as shown below to perform measurement while suppressing the effects of up and down shaking or position drift of the target object.

1 BEFORE USING THE PRODUCT 1.5 Installation Method 33

34

When there are step differences When there are step differences in a moving target object measurement, the sensor head can be installed as shown below to perform measurement while suppressing the effects of step edges.

1 BEFORE USING THE PRODUCT 1.5 Installation Method

1

Measurement in narrow space or concave area When performing measurement in a narrow space or hole, install the sensor head so that the light path from the light emitting part to the light receiving part is not blocked.

When the measurement object is black, or when light intensity is insufficient When performing measurement of black target object with low reflectance, the light intensity entering the light receiving part reduces, and the signal obtained from the linear image sensor becomes small, resulting in a decline in resolution. In this case, perform installing as follows to boost the received light intensity.

When installing the sensor head on a wall surface To avoid multiple reflected lights on a wall surface from entering the light receiving part, install the sensor head as shown below. In addition, when the reflectance of the wall surface is high, setting to a non-glossy black color can be effective.

Specular reflection installing Approaching the measurement object

A specular reflection component with a large reflected light amount is received, for improved accuracy.

The received light intensity is in inverse proportion to the square of the distance from the measurement object. When the distance to the measurement object is shortened, the received light intensity increases.

Black target Black target

1 BEFORE USING THE PRODUCT 1.5 Installation Method 35

36

Center of measurement and sensor head angle Diffuse reflection measurement As shown below, install the sensor head so that the surface of light emitting part and light receiving part is parallel to the measurement object. For the measurement center distance and measurement range, refer to the sensor head specifications. ( Page 39 Sensor Head Specifications)

Specular reflection measurement As shown below, install the sensor head so that the angles of the light emitting laser beam and light receiving laser beam to the measurement object is left-right symmetrical. When positioned correctly, the measurement object and specular reflection line (slope of sensor head) are perpendicular to each other, as shown below. For the measurement center distance and measurement range, refer to the sensor head specifications. ( Page 39 Sensor Head Specifications)

MH11H050NA and MH11H080NA have two installing surfaces. Note that the installing surfaces of the specular reflection lines differ between MH11H050NA and MH11H080NA.

90 degrees

Diffuse reflection line

Specular reflection line

90 degrees

Specular reflection line of MH11H080NA

Specular reflection line of MH11H050NA

1 BEFORE USING THE PRODUCT 1.5 Installation Method

1

Attaching the ND filter Attach the ND filter when the received light intensity is too large. When attaching the ND filter, with screw holes in two locations on the sensor head, use the provided M2.64 bind screws to firmly fix the filter in place. Set the tightening torque to 0.3Nm or less.

Precautions Attach the ND filter with care to avoid leaving fingerprints or scratches on the glass area. In addition, if it gets contaminated with fingerprints or due to other reasons, use an optical cloth to wipe it down, so as to avoid scratching.

ND filter

MH11H03B0NA, MH11H050NA, MH11H080NA, MH11H110NA, MH11H35C3NA

MH11H350NA

1 BEFORE USING THE PRODUCT 1.5 Installation Method 37

38

2 SPECIFICATIONS This chapter describes the specifications for the sensor head and ND filter.

2.1 General Specifications

*1 This indicates the section of the power supply to which the equipment is assumed to be connected between the public electrical power distribution network and the machinery within premises. Category applies to equipment for which electrical power is supplied from fixed facilities. The surge voltage withstand level for up to the rated voltage of 300V is 2500V.

*2 This index indicates the degree to which conductive material is generated in terms of the environment in which the equipment is used. Pollution degree 2 is when only non-conductive pollution occurs. A temporary conductivity caused by condensing must be expected occasionally.

Item Specifications Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Storage ambient temperature -20 to 70

Operating ambient humidity 35 to 85%RH, no dew condensation

Storage ambient humidity 35 to 85%RH, no dew condensation

Vibration resistance Frequency: 10 to 55Hz Amplitude: 1.5mm Sweep: X, Y, Z directions (120 minutes each)

Shock resistance 196m/, X, Y, Z directions, 3 times each

Operating atmosphere No corrosive gas or flammable gas

Operating altitude 0 to 2000m

Installation location Incandescent lamp: Light receiving surface illuminance of 3000lx or less Do not allow ambient light, such as sunlight or light with the same wavelength as laser beam, to enter the light receiving part.

Overvoltage category*1 or less

Pollution degree*2 2 or less

2 SPECIFICATIONS 2.1 General Specifications

2

2.2 Sensor Head Specifications

Sensor head model name The sensor head displays the model name as shown below.

Product specification notes Measuring conditions are as follows unless otherwise specified: With the control module connected, power voltage of the control module: 24VDC, ambient temperature: 20, sampling cycle: 40s, average times: 256, at measurement center distance, measurement object: white ceramic (8mm type and 10mm type are aluminum vapor deposition surface reflection mirror, and 15mm type is transparent glass), and digital measurement value.

Item Code Description Export regulation NA Products not subject to export regulations

Beam spot S Small spot

L Line spot

Special specifications 0 Normal product

1 Special form product (8mm type)

2 Special form product (15mm type)

3 Wide measurement range product

Laser class A Class 1 (JIS/IEC/GB/FDA)

B Class 2 (JIS/IEC/GB/FDA)

C Class 3R (JIS/IEC/GB/FDA)

Measurement center distance 01 8mm/10mm/15mm type

03 30mm type

05 50mm type

08 85mm type

11 110mm type

35 350mm type

MH11H

Export control

Beam spot

Special specifications

Laser class

Measurement center distance

2 SPECIFICATIONS 2.2 Sensor Head Specifications 39

40

10mm type

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 The measurement range is limited between 0.1 and 1.0mm (in case the sampling cycle is 20s), or between 0.8 and 1.0mm (in case the

sampling cycle is 10s). *2 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity.

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*3 The variation in ambient illuminance is 0.02% F.S. or less. *4 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H01A0SNA MH11H01A0LNA Measurement method Specular reflection

Measurement center distance 10mm

Measurement range*1 1mm

Beam source Red semiconductor laser, Class 1 (JIS/IEC/GB/FDA) Max output: 0.1mW, Emission peak wavelength: 658nm

Beam diameter*2 Approx. 20m Approx. 20 700m

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.02% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*4

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*3 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 250g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications

2

30mm type

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0 and 5.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0 and

4.6mm (in case the sampling cycle is 20s at specular reflection), between 3.8 and 5.0mm (in case the sampling cycle is 10s at diffuse reflection), or between 3.6 and 4.6mm (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H03B0SNA MH11H03B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 30mm 26.4mm 30mm 26.4mm

Measurement range*2 5mm 4.6mm 5mm 4.6mm

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA) Max output: 1mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 30m Approx. 30 1200m

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

0.4m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 250g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications 41

42

50mm type (Class 2)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0.5 and 5.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0.5 and

5.0mm (in case the sampling cycle is 20s at specular reflection), between 4.7 and 5.0mm (in case the sampling cycle is 10s at diffuse reflection), or between 4.6 and 5.0mm (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H05B0SNA MH11H05B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 50mm 46mm 50mm 46mm

Measurement range*2 5mm

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA) Max output: 1mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 70m Approx. 70 1000m

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

0.4m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications

2

50mm type (Class 3R)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0.5 and 5.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0.5 and

5.0mm (in case the sampling cycle is 20s at specular reflection), between 4.7 and 5.0mm (in case the sampling cycle is 10s at diffuse reflection), or between 4.6 and 5.0mm (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H05C0SNA MH11H05C0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 50mm 46mm 50mm 46mm

Measurement range*2 5mm

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA) Max output: 5mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 70m Approx. 70 1000m

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

0.4m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications 43

44

85mm type (Class 2)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0 and 20mm (in case the sampling cycle is 20s at diffuse reflection), between 0 and 6mm

(in case the sampling cycle is 20s at specular reflection), between 18 and 20mm (in case the sampling cycle is 10s at diffuse reflection), or unmeasurable (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H08B0SNA MH11H08B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 85mm 81.4mm 85mm 81.4mm

Measurement range*2 20mm 6mm 20mm 6mm

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA) Max output: 1mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 100m Approx. 100 1200m

Light receiving element Linear image sensor

Resolution 0.6m/average times 256, 0.25m/average times: 4096

Linearity 0.03% F.S. 0.1% F.S. 0.03% F.S. 0.1% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

0.5m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications

2

85mm type (Class 3R)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0 and 20mm (in case the sampling cycle is 20s at diffuse reflection), between 0 and 6mm

(in case the sampling cycle is 20s at specular reflection), between 18 and 20mm (in case the sampling cycle is 10s at diffuse reflection), or unmeasurable (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H08C0SNA MH11H08C0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 85mm 81.4mm 85mm 81.4mm

Measurement range*2 20mm 6mm 20mm 6mm

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA) Max output: 5mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 100m Approx. 100 1200m

Light receiving element Linear image sensor

Resolution 0.6m/average times 256, 0.25m/average times: 4096

Linearity 0.03% F.S. 0.1% F.S. 0.03% F.S. 0.1% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

0.5m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications 45

46

110mm type (Class 2)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0.5 and 15.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0.5 and

14.5mm (in case the sampling cycle is 20s at specular reflection), between 12.5 and 15.0mm (in case the sampling cycle is 10s at diffuse reflection), or between 12.5 and 14.5mm (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H11B0SNA MH11H11B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 110mm 106.7mm 110mm 106.7mm

Measurement range*2 15mm 14.5mm 15mm 14.5mm

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA) Max output: 1mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 80m Approx. 80 1700m

Light receiving element Linear image sensor

Resolution 0.25m/average times: 4096

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

0.5m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications

2

110mm type (Class 3R)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0.5 and 15.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0.5 and

14.5mm (in case the sampling cycle is 20s at specular reflection), between 12.5 and 15.0mm (in case the sampling cycle is 10s at diffuse reflection), or between 12.5 and 14.5mm (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H11C0SNA MH11H11C0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 110mm 106.7mm 110mm 106.7mm

Measurement range*2 15mm 14.5mm 15mm 14.5mm

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA) Max output: 5mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 80m Approx. 80 1700m

Light receiving element Linear image sensor

Resolution 0.25m/average times: 4096

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

0.5m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications 47

48

350mm type (Class 2)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0.0 and 50mm (in case the sampling cycle is 20s at diffuse reflection), between 0.0 and

42mm (in case the sampling cycle is 20s at specular reflection), between 36 and 50mm (in case the sampling cycle is 10s at diffuse reflection), or between 36 and 42mm (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H35B0SNA MH11H35B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 350mm 348mm 350mm 348mm

Measurement range*2 50mm 42mm 50mm 42mm

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA) Max output: 1mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 250m Approx. 250 3500m

Light receiving element Linear image sensor

Resolution 2.0m/average times: 256, 0.5m/average times: 4096

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

1.4m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 450g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications

2

350mm type (Class 3R)

MH11H35C0SNA, MH11H35C0LNA

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between 0.0 and 50mm (in case the sampling cycle is 20s at diffuse reflection), between 0.0 and

42mm (in case the sampling cycle is 20s at specular reflection), between 36 and 50mm (in case the sampling cycle is 10s at diffuse reflection), or between 36 and 42mm (in case the sampling cycle is 10s at specular reflection).

*3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity. Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.03% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H35C0SNA MH11H35C0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection Measurement method*1 Diffuse reflection/specular reflection

Measurement center distance 350mm 348mm 350mm 348mm

Measurement range*2 50mm 42mm 50mm 42mm

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA) Max output: 5mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 250m Approx. 250 3500m

Light receiving element Linear image sensor

Resolution 2.0m/average times: 256, 0.5m/average times: 4096

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

1.4m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 450g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications 49

50

MH11H35C3SNA, MH11H35C3LNA

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 Use the ND filter in case the amount of reflected beam is too large. *2 The measurement range is limited between -70 and 200mm (in case the sampling cycle is 20s), or between 100 and 200mm (in case

the sampling cycle is 10s). *3 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity.

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*4 The variation in ambient illuminance is 0.08% F.S. or less. *5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H35C3SNA MH11H35C3LNA Measurement method*1 Diffuse reflection

Measurement center distance 350mm

Measurement range*2 200mm

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA) Max output: 5mW, Emission peak wavelength: 658nm

Beam diameter*3 Approx. 400m Approx. 400 6500m

Light receiving element Linear image sensor

Resolution 8m/average times: 256, 2m/average times: 4096

Linearity 0.04%F.S. (-200 to 0mm), 0.08%F.S. (0 to 200mm) (F.S. = 200mm)

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*5

1.4m

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*4 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications

2

8mm type (Class 1)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 The measurement range is limited between 0.1 and 0.8mm (in case the sampling cycle is 20s), or between 0.7 and 0.8mm (in case the

sampling cycle is 10s). *2 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity.

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*3 The variation in ambient illuminance is 0.02% F.S. or less. *4 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H01A1SNA MH11H01A1LNA Measurement method Specular reflection

Measurement center distance 8mm

Measurement range*1 0.8mm

Beam source Red semiconductor laser, Class 1 (JIS/IEC/GB/FDA) Max output: 0.1mW, Emission peak wavelength: 658nm

Beam diameter*2 Approx. 20m Approx. 20 700m

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.02% F.S.

Temperature characteristics 0.02% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*4

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*3 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Aluminum Front cover: Glass

Cable length 0.08m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications 51

52

15mm type (Class 1)

For measuring conditions not specified, refer to the following. Page 39 Product specification notes *1 The measurement range is limited between 0.1 and 1.0mm (in case the sampling cycle is 20s), or between 0.8 and 1.0mm (in case the

sampling cycle is 10s). *2 The figure shows the value at measurement center distance. It is determined by 1/e2 (approximately 13.5%) of center beam intensity.

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may affect the measurement value.

*3 The variation in ambient illuminance is 0.02% F.S. or less. *4 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

Item MH11H01A2SNA MH11H01A2LNA Measurement method Specular reflection

Measurement center distance 15mm

Measurement range*1 1mm

Beam source Red semiconductor laser, Class 1 (JIS/IEC/GB/FDA) Max output: 0.3mW, Emission peak wavelength: 658nm

Beam diameter*2 Approx. 30m Approx. 30 1400m

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.02% F.S.

Temperature characteristics 0.02% F.S./

Safety distance (Normal ocular hazard distance: NOHD)*4

Indicator Laser radiation indicator

Green light-emitting diode ON during laser radiation

Measurement range indicator

Yellow light-emitting diode ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand voltage

Commercial frequency

500VAC, 1 minute (between all the terminals and case)

Impulse 1000V, 1.2/50s (between all the terminals and case)

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm X, Y, Z directions, 2 hours each

Shock resistance 196m/ X, Y, Z directions, 3 times each

Ambient illuminance 3000lx or less*3 (illuminance at light receiving surface using incandescent lamp)

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Aluminum Front cover: Glass

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 400g (including the sensor head cable)

2 SPECIFICATIONS 2.2 Sensor Head Specifications

2

2.3 ND Filter Specifications

*1 Attach and use the ND filter in case the amount of reflected beam from the measurement object is too large.

Item MH11F98 Applicable sensor head MH11H03B0SNA, MH11H03B0LNA, MH11H050SNA, MH11H050LNA, MH11H080SNA, MH11H080LNA,

MH11H110SNA, MH11H110LNA, MH11H350SNA, MH11H350LNA, MH11H35C3SNA, MH11H35C3LNA

Reduced intensity rate 98%*1

Shock resistance 196m/ or more X, Y, Z directions, 3 times each

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed) At storage: -20 to 70

Operating ambient humidity 35 to 85%RH At storage: 35 to 85%RH

Material Mounting support area: Aluminum ND area: Glass

Weight Approx. 20g

Accessory Two mounting screws

2 SPECIFICATIONS 2.3 ND Filter Specifications 53

54

3 MAINTENANCE AND INSPECTION

3.1 Maintenance

Maintenance instructions Sensor head cleaning Before cleaning the sensor head, always disconnect the power supply and stop laser emission. Errors may occur if the substance that refracts light such as oil and fingerprints, or the substance that blocks light such as

dust and dirt exists on the light emitting or receiving parts at the sensor head. Inspect the surfaces regularly and always keep them clean.

To remove large particles of dust, blow them away using a camera lens blower. To remove small particles of dust and fingerprints, use soft lens cleaning cloth or lens cleaner paper to lightly wipe them out. Use cloth moistened with a small amount of alcohol to wipe out tough dirt carefully. Molded resin is used in some parts of the sensor head. Do not use organic solvents such as thinner and benzene to wipe

dirt on it. Otherwise, molded resin may be dissolved. Do not wipe the glass portion of laser aperture too hard. Scratches on the glass may cause errors.

3.2 Inspection Inspect the sensor head regularly to ensure performance and to use it under optimum conditions.

Major inspection items Check that the glass surface on the laser aperture is free from dust, dirt, or fingerprints. Check that the operating ambient temperature is within the range of 0 to 45. Check that the operating ambient humidity is within the range of 35 to 85%RH.

3 MAINTENANCE AND INSPECTION 3.1 Maintenance

3

MEMO

3 MAINTENANCE AND INSPECTION 3.2 Inspection 55

56

4 TROUBLESHOOTING For details on occurring errors and troubleshooting when using a sensor head, refer to the following. MELSEC iQ-R Laser Displacement Sensor Control Module User's Manual (Application)

4 TROUBLESHOOTING

4

MEMO

4 TROUBLESHOOTING 57

58

APPENDICES Appendix 1 External Dimensions

Sensor head 10mm type (MH11H01A0SNA, MH11H01A0LNA)

(Unit: mm)

30mm type (MH11H03B0SNA, MH11H03B0LNA) Diffuse reflection installation

(Unit: mm)

Reference surface

(Measurement center distance)

Light emission axis

Light reception axis

Measurement range indicator (yellow)

Laser emission indicator (green)

2-M5 mounting hole, Depth:8 (same as the hole at the diagonal position)

(Measurement center distance)

Light emission axis

Light reception axis

2-M5 mounting hole Depth:10 (same as the hole at the diagonal position)

Measurement range indicator (yellow)

Laser emission indicator (green)

APPX Appendix 1 External Dimensions

A

Specular reflection installation

(Unit: mm)

50mm type (MH11H05B0SNA, MH11H05B0LNA, MH11H05C0SNA, MH11H05C0LNA) Diffuse reflection installation

(Unit: mm) Specular reflection installation

(Unit: mm)

Specular reflection line

The reference surface for specular reflection installation

(Measurement center distance)

Light emission axis

Light reception axis

26

50

5

36

74

64 6.6

6.213

9

75 90

64 69

5

(550)

(14.7)

(Measurement center distance)

Light reception axis

2-M5 mounting hole Depth:10 (same as the hole at the diagonal position)

Laser emission indicator (green)

Measurement range indicator (yellow)

Light emission axis

46

18

28.2

55 .4

91 .1

4. 9

10 1

89

37.7

9

(3.8)

Specular reflection line

The reference surface for specular reflection installation

(Measurement center distance)

Light reception axis

Light emission axis

APPX Appendix 1 External Dimensions 59

60

85mm type (MH11H08B0SNA, MH11H08B0LNA, MH11H08C0SNA, MH11H08C0LNA) Diffuse reflection installation

(Unit: mm) Specular reflection installation

(Unit: mm)

26

85

5

28

74

64

6.213

9

75 90

64 69

5

6.6

(14.7)

(550)

(Measurement center distance)

Light reception axis

2-M5 mounting hole Depth:10 (same as the hole at the diagonal position)

Laser emission indicator (green)

Measurement range indicator (yellow)

Light emission axis

81.4

14

23.1

52 .5

88 .3

5. 4

98 .7

86.3

44

9

(3.5) (Measurement center distance)

Light reception axis

Light emission axis

Specular reflection line

The reference surface for specular reflection installation

APPX Appendix 1 External Dimensions

A

110mm type (MH11H11B0SNA, MH11H11B0LNA, MH11H11C0SNA, MH11H11C0LNA) Diffuse reflection installation

(Unit: mm) Specular reflection installation

(Unit: mm)

350mm type (MH11H35B0SNA, MH11H35B0LNA, MH11H35C0SNA, MH11H35C0LNA) Diffuse reflection installation

(Unit: mm)

Light reception axis

Measurement range indicator (yellow)

(Measurement center distance)

2-M5 mounting hole Depth:10 (same as the hole at the diagonal position)

Light emission axis

Laser emission indicator (green)

(Measurement center distance)

Light emission axis

Light reception axis

Specular reflection line

The reference surface for specular reflection installation

Light reception axis

Measurement range indicator (yellow)

(Measurement center distance)

2-M5 mounting hole Depth:10

(same as the hole at the diagonal position)

Laser emission indicator (green)

Light emission axis

APPX Appendix 1 External Dimensions 61

62

Specular reflection installation

(Unit: mm)

350mm type (MH11H35C3SNA, MH11H35C3LNA)

(Unit: mm)

Specular reflection line

The reference surface for specular reflection installation

(Measurement center distance)

Light emission axis

Light reception axis

26

350

5

8.8

74

64 6.6

6.213

9

75 90

64 69

5

(14.7)

(550)

(Measurement center distance)

Light reception axis

2-M5 mounting hole Depth:10 (same as the hole at the diagonal position)

Laser emission indicator (green)

Measurement range indicator (yellow)

Light emission axis

APPX Appendix 1 External Dimensions

A

8mm type (MH11H01A1SNA, MH11H01A1LNA)

(Unit: mm)

15mm type (MH11H01A2SNA, MH11H01A2LNA)

(Unit: mm)

33.517 135

24

16

12 45

32

41

127

278

4.5

8

10

2 17

9

7 4

(14.7)6.6

62 64.5

5 18

39

27

80

84

2-4.5 (mounting hole)

Light emission axis

Light reception axis

Measurement range indicator (yellow)

Laser emission indicator (green)

30

38

12 61

49

57

127 135

17 103

38 2815

50

4.5

8

18

8 4

(550)

6.6

(14.7)

95

19 26 34.5

5

92.5

100

2-4.5 (mounting hole)

Measurement range indicator (yellow)

Laser emission indicator (green)

Light emission axis

Light reception axis

APPX Appendix 1 External Dimensions 63

64

ND filter (MH11F98)

(Unit: mm) Diffuse reflection installation (ND filter attached) (MH11H03B0SNA, MH11H03B0LNA)

(Unit: mm) Specular reflection installation (ND filter attached) (MH11H03B0SNA, MH11H03B0LNA)

(Unit: mm)

Installing dimensions are also the same in the applicable sensor heads other than the MH11H03B0SNA and MH11H03B0LNA.

2

25

2 15

227

7

11

22 15

2

2

25

(1.6)

(1.6)

9

APPX Appendix 1 External Dimensions

A

Appendix 2 Characteristics

Beam diameter The following figures show the beam diameter of each sensor head type.

10mm type

(Unit: mm)

30mm type

(Unit: mm)

50mm type

(Unit: mm)

0.12 0.02 0.12

0.55 0.70 0.85

0.12 0.02 0.12

Measurement range

Measurement center distance

MH11H01A0SNA Small spot

MH11H01A0LNA Line spot

0.22 0.03 0.22

0.85 1.2 1.55

0.18

0.18

0.03

0.03

0.18

0.18

Measurement range

Measurement center distance

MH11H03B0SNA Small spot

MH11H03B0LNA Line spot

0.13 0.07 0.13

0.7 1.0 1.3

0.11

0.11

0.07

0.07

0.11

0.11

Measurement range

Measurement center distance

MH11H050SNA Small spot

MH11H050LNA Line spot

APPX Appendix 2 Characteristics 65

66

85mm type

(Unit: mm)

110mm type

(Unit: mm)

350mm type (MH11H35B0SNA, MH11H35B0LNA, MH11H35C0SNA, MH11H35C0LNA)

(Unit: mm)

0.4 0.1 0.4

0.4 1.2 2.0

0.25

0.25

0.1

0.1

0.25

0.25

Measurement range

Measurement center distance

MH11H080SNA Small spot

MH11H080LNA Line spot

0.24 0.08 0.24

1.2 1.7 2.2

0.2

0.2

0.08

0.08

0.2

0.2

Measurement range

Measurement center distance

MH11H110SNA Small spot

MH11H110LNA Line spot

0.35 0.25 0.35

2.8 3.5 4.2

0.35

0.35

0.25

0.25

0.35

0.35

Measurement range

Measurement center distance

MH11H350SNA Small spot

MH11H350LNA Line spot

APPX Appendix 2 Characteristics

A

350mm type (MH11H35C3SNA, MH11H35C3LNA)

(Unit: mm)

8mm type

(Unit: mm)

15mm type

(Unit: mm)

1.5 0.4 1.5

1.0 6.5 12.0

0.8

0.8

0.4

0.4

0.8

0.8

Measurement range

Measurement center distance

MH11H35C3SNA

Small spot

MH11H35C3LNA

Line spot

0.12

0.55

0.12

0.70 0.85

0.120.02

0.120.02

Measurement range

Measurement center distance

MH11H01A1SNA Small spot

MH11H01A1LNA Line spot

1.25

0.14

0.14 0.14

1.40

0.03

0.03

1.55

0.14

Measurement range

Measurement center distance

MH11H01A2SNA Small spot

MH11H01A2LNA Line spot

APPX Appendix 2 Characteristics 67

68

Mutual interference area When two or more diffuse reflection sensor heads are installed side by side, mutual interference occurs if the laser spots from other sensor heads fall within the shaded areas in the following figures. Install sensor heads so that the laser spots from other sensor heads fall outside the shaded areas.

30mm type (MH11H03B0SNA, MH11H03B0LNA)

(Unit: mm)

50mm type (MH11H05B0SNA, MH11H05B0LNA, MH11H05C0SNA, MH11H05C0LNA)

(Unit: mm)

85mm type (MH11H08B0SNA, MH11H08B0LNA, MH11H08C0SNA, MH11H08C0LNA)

(Unit: mm)

11

13 13

2

1

11

24 .5

35 .5

9

10

3 213

5

2

10

45

55

9

35

6

3

24

6 3

40

65

10 5

APPX Appendix 2 Characteristics

A

110mm type (MH11H11B0SNA, MH11H11B0LNA, MH11H11C0SNA, MH11H11C0LNA)

(Unit: mm)

350mm type (MH11H35B0SNA, MH11H35B0LNA, MH11H35C0SNA, MH11H35C0LNA)

(Unit: mm)

350mm type (MH11H35C3SNA, MH11H35C3LNA)

(Unit: mm)

If beam from the other sensor head enters the mutual interference area when two sensor heads are connected, turn on the interference prevention function.

9

16

3

2

20

5

230

95

12 5

9

305 23

3

100

400 300

3 3

8 8

16 0

11 47

18

150

400

550

APPX Appendix 2 Characteristics 69

70 APPX Appendix 3 How to Confirm Serial Number and Function Version

Appendix 3 How to Confirm Serial Number and Function Version

The serial number and function version of the sensor head can be confirmed by the rating plate on the side of the product.

(1) Serial number (2) Function version (3) Applicable standard symbol

(1)

(2)

(3)

APPX Appendix 4 Export Regulations by Japanese Government 71

A

Appendix 4 Export Regulations by Japanese Government

The products have specifications not subject to export regulations by the Foreign Exchange and Foreign Trade Law.

72

INDEX

A Attaching the ND filter . . . . . . . . . . . . . . . . . . . . 37

C Control module . . . . . . . . . . . . . . . . . . . . . . . . . 11

E Engineering tool . . . . . . . . . . . . . . . . . . . . . . . . 11

F F.S. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 FDA. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

J JIS/IEC/GB. . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

L Laser displacement sensor . . . . . . . . . . . . . . . . 11

M Measurement center distance . . . . . . . . . . . . . . 11 Measurement range . . . . . . . . . . . . . . . . . . . . . 11

N ND filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

S Sensor head. . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Setting tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

I

73

MEMO

74

REVISIONS *The manual number is given on the bottom left of the back cover.

Japanese manual number: SH-082022-B

2019 MITSUBISHI ELECTRIC CORPORATION

Revision date *Manual number Description June 2019 SH(NA)-082023ENG-A First edition

April 2020 SH(NA)-082023ENG-B Added or modified parts TERMS, GENERIC TERMS AND ABBREVIATIONS, Section 1.1

This manual confers no industrial property rights or any rights of any other kind, nor does it confer any patent licenses. Mitsubishi Electric Corporation cannot be held responsible for any problems involving industrial property rights which may occur as a result of using the contents noted in this manual.

75

WARRANTY Please confirm the following product warranty details before using this product.

1. Gratis Warranty Term and Gratis Warranty Range

If any faults or defects (hereinafter "Failure") found to be the responsibility of Mitsubishi occurs during use of the product within the gratis warranty term, the product shall be repaired at no cost via the sales representative or Mitsubishi Service Company. However, if repairs are required onsite at domestic or overseas location, expenses to send an engineer will be solely at the customer's discretion. Mitsubishi shall not be held responsible for any re-commissioning, maintenance, or testing on-site that involves replacement of the failed module. [Gratis Warranty Term] The gratis warranty term of the product shall be for one year after the date of purchase or delivery to a designated place. Note that after manufacture and shipment from Mitsubishi, the maximum distribution period shall be six (6) months, and the longest gratis warranty term after manufacturing shall be eighteen (18) months. The gratis warranty term of repair parts shall not exceed the gratis warranty term before repairs. [Gratis Warranty Range] (1) The range shall be limited to normal use within the usage state, usage methods and usage environment, etc., which

follow the conditions and precautions, etc., given in the instruction manual, user's manual and caution labels on the product.

(2) Even within the gratis warranty term, repairs shall be charged for in the following cases. 1. Failure occurring from inappropriate storage or handling, carelessness or negligence by the user. Failure caused

by the user's hardware or software design. 2. Failure caused by unapproved modifications, etc., to the product by the user. 3. When the Mitsubishi product is assembled into a user's device, Failure that could have been avoided if functions

or structures, judged as necessary in the legal safety measures the user's device is subject to or as necessary by industry standards, had been provided.

4. Failure that could have been avoided if consumable parts (battery, backlight, fuse, etc.) designated in the instruction manual had been correctly serviced or replaced.

5. Failure caused by external irresistible forces such as fires or abnormal voltages, and Failure caused by force majeure such as earthquakes, lightning, wind and water damage.

6. Failure caused by reasons unpredictable by scientific technology standards at time of shipment from Mitsubishi. 7. Any other failure found not to be the responsibility of Mitsubishi or that admitted not to be so by the user.

2. Onerous repair term after discontinuation of production

(1) Mitsubishi shall accept onerous product repairs for seven (7) years after production of the product is discontinued. Discontinuation of production shall be notified with Mitsubishi Technical Bulletins, etc.

(2) Product supply (including repair parts) is not available after production is discontinued.

3. Overseas service

Overseas, repairs shall be accepted by Mitsubishi's local overseas FA Center. Note that the repair conditions at each FA Center may differ.

4. Exclusion of loss in opportunity and secondary loss from warranty liability

Regardless of the gratis warranty term, Mitsubishi shall not be liable for compensation to: (1) Damages caused by any cause found not to be the responsibility of Mitsubishi. (2) Loss in opportunity, lost profits incurred to the user by Failures of Mitsubishi products. (3) Special damages and secondary damages whether foreseeable or not, compensation for accidents, and

compensation for damages to products other than Mitsubishi products. (4) Replacement by the user, maintenance of on-site equipment, start-up test run and other tasks.

5. Changes in product specifications

The specifications given in the catalogs, manuals or technical documents are subject to change without prior notice.

76

TRADEMARKS The company names, system names and product names mentioned in this manual are either registered trademarks or trademarks of their respective companies. In some cases, trademark symbols such as '' or '' are not specified in this manual.

SH(NA)-082023ENG-B

SH(NA)-082023ENG-B(2004)MEE MODEL: MH11-U-SH-E MODEL CODE: 13JX93

Specifications subject to change without notice.

When exported from Japa

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