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Agilent 10 I/s Vaclon 919-5005 Vacuum User Manual PDF

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Summary of Content for Agilent 10 I/s Vaclon 919-5005 Vacuum User Manual PDF

10 l/s VacIon pump

Pump body 919-5005 Magnet 911-0030

Manuale di Istruzioni Bedienungshandbuch Notice de Mode DEmploi User Manual

87-900-139-01(A) 01/2012

10 l/s VacIon pump User Manual / 01/2012

Notices Agilent Technologies, Inc. 2011

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.

Manual Part Number Publication Number: 87-900-139-01(A)

Edition Edition 01/2012

Printed in ITALY

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Lein (TO)

ITALY

Warranty The material contained in this document is provided as is, and is subject to being changed, without notice, in future editions. Further, to the maximum extent permitted by applicable law, Agilent disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not limited to the implied warranties of merchantability and fitness for a particular purpose. Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing, use, or performance of this document or of any information contained herein. Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall control.

Technology Licenses The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

Restricted Rights Legend If software is for use in the performance of a U.S. Government prime contract or subcontract, Software is delivered and licensed as Commercial computer software as defined in DFAR 252.227-7014 (June 1995), or as a commercial item as defined in FAR 2.101(a) or as Restricted computer software as defined in FAR 52.227-19 (June 1987) or any equivalent agency regulation or

contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms, and non- DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as defined in FAR 52.227-19(c)(1-2) (June 1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June 1987) or DFAR 252.227-7015 (b)(2) (November 1995), as applicable in any technical data.

Trademarks Windows and MS Windows are U.S. registered trademarks of Microsoft Corporation.

Safety Notices

A CAUTION notice denotes a hazard. It calls attention to an operating procedure, practice, or the like that, if not correctly performed or adhered to, could result in damage to the product or loss of important data. Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met.

A WARNING notice denotes a hazard. It calls attention to an operating procedure, practice, or the like that, if not correctly performed or adhered to, could result in personal injury or death. Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met.

WARNING

CAUTION

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10 l/s VacIon

10 l/s VacIon

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Contents

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Contents

1 Procedura per linstallazione 9

Informazioni generali 10

Preparazione per linstallazione 11

Installazione 13

Uso 15

Procedure di uso 16

Manutenzione 17

Smaltimento 18

2 Anleitung zur Installation 19

Allgemeine Hinweise 20

Vor der Installation 21

Installation 23

Gebrauch 25

Bedienungsschritte 26

Wartung 27

Entsorgung 28

3 Procdure pour linstallation 29

Indications gnrales 30

Prparation de l'installation 31

Contents

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Installation 33

Utilisation 35

Procdure dutilisation 36

Maintenance 37

Mise au rebut 38

4 Installation procedure 39

General Information 40

Preparation for Installation 41

Installation 43

Use 45

Operating Procedure 46

Maintenance 47

Disposal 48

5 Technical Information 49

10 l/s VacIon Pump Controllers 49

Description of the VacIon Pump 50

Technical Specification 51

Outline Drawing 54

Stray Magnetic Field 55

VacIon Pump Installation 58

Typical Installation 61

Inlet Flange Connection 62

Contents

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Control Unit Connection 63

Pump Connection 64

Bakeout Operation 64

Pump Speed & Noble Gases 66

Maintenance 67

10 l/s VacIon Pump Replacement Parts and Accessories 70

10 l/s VacIon Pump Controllers 71

Contents

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1 Procedura per linstallazione Informazioni generali 10 Preparazione per linstallazione 11 Installazione 13 Uso 15 Procedure di uso 16 Manutenzione 17 Smaltimento 18 Traduzione delle istruzioni originali

1 Procedura per linstallazione Informazioni generali

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Informazioni generali Questa apparecchiatura destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita da Agilent prima dell'utilizzo dell'apparecchiatura. Agilent si ritiene sollevata da eventuali responsabilit dovute all'inosservanza totale o parziale delle istruzioni, ad uso improprio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche.

Le pompe della serie VacIon sono pompe ioniche utilizzate comunemente per applicazioni di ultra alto vuoto, grazie alla loro pulizia, capacit di pompare qualsiasi tipo di gas, e del loro funzionamento senza vibrazioni e necessit di manutenzione.

Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell'operatore durante l'utilizzo dell'apparecchiatura. Informazioni dettagliate sono fornite nell'appendice Technical Information.

Questo manuale utilizza le seguenti convenzioni:

AVVERTENZA!

I messaggi di avvertenza attirano l'attenzione dell'operatore su una procedura o una pratica specifica che, se non eseguita in modo corretto, potrebbe provocare gravi lesioni personali.

ATTENZIONE! I messaggi di attenzione sono visualizzati prima di procedure che, se non osservate, potrebbero causare danni all'apparecchiatura.

NOTA Le note contengono informazioni importanti estrapolate dal testo.

Procedura per linstallazione Preparazione per linstallazione

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Preparazione per linstallazione La pompa viene fornita in un imballo protettivo speciale; se si presentano segni di danni, che potrebbero essersi verificati durante il trasporto, contattare l'ufficio vendite locale.

Durante l'operazione di disimballaggio, prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni.

Non disperdere l'imballo nell'ambiente. Il materiale completamente riciclabile e risponde alla direttiva CEE 85/399 per la tutela dell'ambiente.

ATTENZIONE! Onde evitare problemi di degassamento, non toccare con le mani nude i componenti destinati ad essere esposti al vuoto. Utilizzare sempre i guanti o altra protezione adeguata.

NOTA La pompa non pu essere danneggiata rimanendo semplicemente esposta all'atmosfera. Si consiglia comunque di mantenerla chiusa fino al momento dell'installazione sul sistema onde evitare eventuale inquinamento da polvere.

1 Procedura per linstallazione Preparazione per linstallazione

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Figura 1

Procedura per linstallazione Installazione

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Installazione Non installare e/o utilizzare la pompa in ambienti esposti ad agenti atmosferici (pioggia, gelo, neve), polveri, gas aggressivi, in ambienti esplosivi o con elevato rischio di incendio. Durante il funzionamento, per ottenere le specifiche tecniche dichiarate, la temperatura ambiente deve essere compresa tra 0 C e +85 C.

ATTENZIONE! La pompa deve essere tenuta sigillata con il suo tubo di ingresso schiacciato finch non pronta per essere collegata al sistema.

Figura 2

AVVERTENZA!

Per evitare lesioni alla persona, non collegare lalta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse.

NO!

1 Procedura per linstallazione Installazione

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Il funzionamento delle pompe ottimizzato solo con luso delle apposite unit di controllo Agilent (4UHV o MiniVac).

ATTENZIONE! Il rispetto delle normative di sicurezza nelluso delle pompe garantito solo con luso delle unit di controllo Agilent.

La pompa VacIon pu essere installata in qualsiasi posizione. Per convenienza normalmente viene montata in posizione verticale con la flangia di ingresso in alto, o in posizione orizzontale.

Le pompe possono anche essere mantenute sospese in ogni posizione tramite la loro flangia di ingresso.

Per informazioni dettagliate sullinstallazione della pompa, vedere lappendice "Technical Information".

Procedura per linstallazione Uso

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Uso Tutte le istruzioni per il corretto funzionamento delle pompe VacIon sono contenute nel manuale dell'unit di controllo.

Leggere attentamente tale manuale prima dell'utilizzo.

Depositi igroscopici e lassorbimento dellidrogeno allinterno del composto di titanio possono provocare lallungamento del tempo di avvio con linvecchiamento della pompa. Durante lesposizione allaria, il deposito del composto di titanio assorbe vapore acqueo; in conseguenza di ci, al successivo avvio, il riscaldamento della pompa provoca il rilascio del vapore e di parte dellidrogeno pompato precedentemente, con leffetto dellallungamento del tempo di avvio.

1 Procedura per linstallazione Procedure di uso

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Procedure di uso Controllare che la polarit dellunit di controllo sia corretta per la pompa.

Fare riferimento al relativo manuale ed osservare la seguente procedura per luso della pompa:

1 Tramite una pompa di pre-vuoto portare il sistema ad una pressione di 1x10-4 mbar, meglio se 10-5, od inferiore.

2 Collegare lunit di controllo ad una apposita fonte di alimentazione ed accenderla.

3 Osservare la tensione, la corrente e la pressione. Un valore di corrente prossimo alla corrente di corto circuito dellunit di controllo indice dellesistenza di una perdita nella pompa o nel sistema. Un temporaneo incremento della pressione di pre-vuoto normale durante la fase di avvio.

4 Lasciare la valvola di prevuoto aperta durante lavvio della pompa ionica finch non si raggiunge una adeguata pressione di avvio. Se la tensione della pompa ionica scende dopo la chiusura della valvola, riaprirla per un pre- pompaggio aggiuntivo. Appena la pressione diminuisce, la tensione cresce nuovamente e la valvola di pre-vuoto deve essere chiusa.

5 Quando si porta la pompa alla pressione atmosferica, usare azoto secco in modo da evitare lassorbimento di vapore acqueo da parte delle pareti della pompa.

AVVERTENZA!

Quando la pompa viene utilizzata per il pompaggio di gas tossici, infiammabili o radioattivi, seguire le appropriate procedure tipiche di ciascun gas. Non usare la pompa in presenza di gas esplosivi.

Procedura per linstallazione Manutenzione

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AVVERTENZA!

Non toccare la pompa durante le operazioni di riscaldamento e di raffreddamento. L'elevata temperatura pu causare lesioni alle persone.

ATTENZIONE! Non avvicinare dispositivi elettronici alla pompa. Il campo magnetico attorno ad essa pu provocare dei malfunzionamenti dei dispositivi stessi.

Manutenzione Le pompe della serie VacIon non richiedono alcuna manutenzione. Qualsiasi intervento deve essere eseguito da personale autorizzato.

AVVERTENZA!

Prima di effettuare qualsiasi intervento sulla pompa scollegarla dallalta tensione.

Qualora una pompa dovesse essere rottamata, procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche.

1 Procedura per linstallazione Smaltimento

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Smaltimento Significato del logo "WEEE" presente sulle etichette.

Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata "WEEE".

Questo simbolo (valido solo per i paesi della Comunit Europea) indica che il prodotto sul quale applicato, NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali, ma deve essere avviato ad un sistema di raccolta differenziata.

Si invita pertanto l'utente finale a contattare il fornitore del dispositivo, sia esso la casa madre o un rivenditore, per avviare il processo di raccolta e smaltimento, dopo opportuna verifica dei termini e condizioni contrattuali di vendita.

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2 Anleitung zur Installation Allgemeine Hinweise 20 Vor der Installation 21 Installation 23 Gebrauch 25 Bedienungsschritte 26 Wartung 27 Entsorgung 28 bersetzung der Originalanleitungen

2 Anleitung zur Installation Allgemeine Hinweise

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Allgemeine Hinweise Dieses Gert ist fr den professionellen Gebrauch bestimmt. Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzdokumentationen genau lesen. Bei vollstndiger bzw. teilweiser Nichtbeachtung der enthaltenen Hinweise, unsachgemem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Miachtung der nationalen Bestimmungen bernimmt Firma Agilent keinerlei Haftung.

Die Pumpen der Serie VacIon sind Ionenzerstuberpumpen, die auf- grund ihrer Reinheit, ihrer Fhigkeit, alle Arten von Gas zu pumpen, und ihres vibrations- und wartungsfreien Betriebes, allgemein fr Ultrahochvakuumanwendungen zum Einsatz kommen.

In den folgenden Abschnitten sind alle erforderlichen Informationen fr die Sicherheit des Bedieners bei der Anwendung des Gerts aufgefhrt. Detaillierte technische Informationen sind im Anhang "Technical Information" enthalten.

In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermaen hervorgehoben:

WARNUNG!

Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik, die bei unkorrekter Ausfhrung schwere Verletzungen hervorrufen knnte.

VORSICHT! Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam, da bei Nichteinhaltung Schden am Gert entstehen knnen.

HINWEIS Die Hinweise enthalten wichtige Informationen, die aus dem Text hervorgehoben werden.

Anleitung zur Installation Vor der Installation

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Vor der Installation Die Pumpe wird in einer speziellen Schutzverpackung geliefert. Eventuelle Transportschden sind der zustndigen rtlichen Verkaufsstelle zu melden.

Beim Auspacken vorsichtig vorgehen, damit die Pumpe nicht fllt oder Sten oder Vibrationen ausgesetzt wird.

Das Verpackungsmaterial ist ordnungsgem zu entsorgen. Es ist vollstndig recyclebar und entspricht der EG-Richtlinie 85/399 fr den Umweltschutz.

VORSICHT! Um Ausgasungsprobleme zu vermeiden, drfen die Komponenten, die mit dem Vakuum in Kontakt kommen, nicht mit bloen Hnden berhrt werden. Stets Handschuhe oder einen anderen geeigneten Schutz tragen.

HINWEIS Die Pumpe kann, wenn sie einfach der Atmosphre ausgesetzt ist, nicht beschdigt werden. Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben, um Verunreinigungen durch Staub zu vermeiden.

2 Anleitung zur Installation Vor der Installation

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Abbildung 1

Anleitung zur Installation Installation

2

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Installation Die Pumpe darf nicht in Umgebungen installiert und/oder benutzt werden, die ungeschtzt vor Witterungsbedingungen (Regen, Frost, Schnee), Staub und aggressiven Gasen sind, und in denen Explosions- und erhhte Brandgefahr besteht.

Whrend des Betriebes soll die Umgebungstemperatur zwischen 0 C und +85 C betragen, um die angegebenen technischen Merkmale zu gewhrleisten.

VORSICHT! Die Pumpe soll versiegelt und mit verschlossener Eingangsffnung aufbewahrt werden, bis sie fr den Anschlu an das System bereit ist.

Abbildung 2

FALSCH!

2 Anleitung zur Installation Installation

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WARNUNG!

Um Personenschden zu vermeiden, darf die Hochspannungsleitung der Pumpe erst angeschlossen werden, wenn die Pumpe im System installiert ist und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind.

Der Pumpenbetrieb wird nur durch den Einsatz speziell dafr vorgesehener Agilent Steuereinheiten (4UHV oder MiniVac) optimiert.

VORSICHT! Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der Pumpen ist nur bei Verwendung von Agilent Steuereinheiten gewhrleistet.

Die Pumpe VacIon kann in einer beliebigen Position installiert werden. Aus praktischen Grnden wird sie in der Regel senkrecht mit nach oben gerichtetem Eintrittsflansch oder waagerecht eingebaut.

Die Pumpen knnen auch in einer beliebigen Position an ihrem Eintrittsflansch hngend eingebaut werden.

Detaillierte Informationen zur Installation der Pumpe sind dem Anhang Technical Information zu entnehmen.

Anleitung zur Installation Gebrauch

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Gebrauch Smtliche Hinweise fr den korrekten Betrieb der Pumpen VacIon sind im Handbuch der Steuereinheit enthalten.

Dieses Handbuch ist vor der Inbetriebnahme genau durchzulesen.

Hygroskopische Ablagerungen und die Absorption von Wasserstoff in der Titanverbindung knnen die Anlaufzeit verlngern und eine krzere Standzeit der Pumpe verursachen. Die Ablagerungen der Titanverbindungen absorbieren Wasserdampf, wenn sie der Luft ausgesetzt werden. Dadurch bewirkt beim anschlieenden Anlaufvorgang die Aufheizung der Pumpe die Abgabe des Dampfes und eines Teils des zuvor gepumpten Wasserstoffs, so da sich die Anlaufzeit verlngert.

2 Anleitung zur Installation Bedienungsschritte

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Bedienungsschritte Es ist zu kontrollieren, da die Steuereinheit in bezug auf die Pumpe richtig gepolt ist.

Es ist nach dem diesbezglichen Handbuch vorzugehen, fr den Gebrauch der Pumpe sind die folgenden Bedienungsschritte zu beachten:

1 Mittels einer Vorvakuumpumpe das System auf einen Druck von 1x10-4, besser 10-5 mbar oder einen niedrigeren Druck bringen.

2 Die Steuereinheit an eine entsprechende Versorgungsquelle anschlieen und einschalten.

3 Die Spannung, die Stromstrke und den Druck beobachten. Ein Stromwert, der sich dem Kurzschlustromwert der Steuereinheit annhert, weist auf eine Leckstelle an der Pumpe oder am System hin. Ein zeitweiliger Anstieg des Vorvakuumdruckes ist whrend der Anlaufphase normal.

4 Whrend des Anlaufes der Ionenpumpe soll das Vorvakuumventil geffnet bleiben, bis ein angemessener Anlaufdruck erreicht ist. Wenn die Spannung der Ionenpumpe nach Schlieung des Ventils abfllt, ist das Ventil fr eine zustzliche Vorvakuumpumpung zu ffnen. Sobald der Druck sinkt, steigt die Spannung erneut an und ist das Vorvakuumventil zu schlieen.

5 Wenn die Pumpe auf den atmosphrischen Druck gebracht wird, ist trockener Stickstoff zu verwenden, um die Aufnahme von Wasserdampf durch die Pumpenwnde zu verhindern.

WARNUNG!

Wenn die Pumpe zur Frderung von giftigen, leicht entflammbaren oder radioaktiven Gasen benutzt wird, sind die fr das jeweilige Gas vorgeschriebenen Vorgnge zu befolgen. Die Pumpe nie bei Vorhandensein von explosivem Gas benutzen.

Anleitung zur Installation Wartung

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WARNUNG!

Darf die Pumpe whrend der Aufheizung und Abkhlung nicht berhrt werden. Die hohe Temperatur kann zu Personenschden fhren.

VORSICHT! Keine elektronischen Gerte in die Nhe der Pumpe bringen. Das darum befindliche Magnetfeld kann zu Funktionsstrungen der Gerte fhren.

Wartung Die Pumpen der Serie VacIon erfordern keine Wartung. Smtliche Eingriffe drfen nur von autorisiertem Personal vorgenommen werden.

WARNUNG!

Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu trennen.

Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschlgigen nationalen Vorschriften zu entsorgen.

2 Anleitung zur Installation Entsorgung

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Entsorgung Bedeutung des "WEEE" Logos auf den Etiketten.

Das folgende Symbol ist in bereinstimmung mit der EU-Richtlinie WEEE (Waste Electrical and Electronic Equipment) angebracht.

Dieses Symbol (nur in den EU-Lndern gltig) zeigt an, dass das betreffende Produkt nicht zusammen mit Haushaltsmll entsorgt werden darf sondern einem speziellen Sammelsystem zugefhrt werden muss.

Der Endabnehmer sollte daher den Lieferanten des Gerts - d.h. die Muttergesellschaft oder den Wiederverkufer - kontaktieren, um den Entsorgungsprozess zu starten, nachdem er die Verkaufsbedingungen geprft hat.

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3 Procdure pour linstallation Indications gnrales 30 Prparation de l'installation 31 Installation 33 Utilisation 35 Procdure dutilisation 36 Maintenance 37 Mise au rebut 38 Traduction de la mode demploi originale

3 Procdure pour linstallation Indications gnrales

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Indications gnrales Cet appareillage a t conu en vue dune utilisation professionnelle. Il est conseill lutilisateur de lire attentivement cette notice dinstructions ainsi que toute autre indication supplmentaire fournie par Agilent avant dutiliser lappareil. Agilent dcline toute responsabilit en cas de non respect total ou partiel des instructions fournies, doprations non autorises, dutilisation impropre par du personnel non form ou contraires aux rglementations nationales spcifiques.

Grce leur propret, leur capacit de pomper tous les types de gaz, leur fonctionnement sans vibrations et labsence dentretien, les pompes de la srie VacIon sont des pompes ioniques gnralement utilises pour des applications de vide ultra pouss.

Les paragraphes suivants fournissent toutes les indications ncessaires garantir la scurit de l'oprateur pendant l'utilisation de l'appareillage. Des renseignements plus dtaills se trouvent dans l'appendice "Technical Information".

Cette notice utilise les signes conventionnels suivants:

AVERTISSEMENT!

Les messages davertissement attirent l'attention de l'oprateur sur une procdure ou une manuvre spciale dont la mauvaise excution risque de provoquer de graves lsions.

ATTENTION! Les messages d'attention apparaissent avant certaines procdures dont le non- respect peut endommager srieusement l'appareillage.

NOTE Les notes contiennent des renseignements importants, extrapols du texte.

Procdure pour linstallation Prparation de l'installation

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Prparation de l'installation La pompe est fournie dans un emballage de protection spcial; si l'on constate des signes dendommagement imputables au transport, contacter aussitt le revendeur local.

Pendant l'opration de dballage, veiller tout particulirement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration.

Ne pas abandonner l'emballage dans la nature. Le matriel est entirement recyclable et il est conforme la directive CEE 85/399 en matire de protection de l'environnement.

ATTENTION! En vue d'viter tout problme de dgazage, ne pas toucher mains nues les lments devant tre exposs au vide. Mettre toujours des gants ou toute autre protection approprie.

NOTE La pompe ne peut tre endommage si elle reste simplement expose l'atmosphre. Il est quoi quil en soit conseill de ne pas la retirer de son emballage avant le moment de l'installation, afin d'viter toute pollution due la poussire.

3 Procdure pour linstallation Prparation de l'installation

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Figure 1

Procdure pour linstallation Installation

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Installation Ne pas installer et/ou utiliser la pompe dans des milieux exposs des agents atmosphriques (pluie, gel, neige), des poussires, des gaz de combat ainsi que dans des milieux explosifs ou fort risque d'incendie. Pendant le fonctionnement, pour respecter les spcifications techniques dclares la temprature ambiante doit tre comprise entre 0 C et +85 C;

ATTENTION! La pompe doit tre conserve scelle avec son tuyau dentre aplati jusqu ce quelle soit prte tre branche au systme.

Figure 2

NON!

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AVERTISSEMENT!

Pour viter toute lsion aux personnes, ne pas brancher la haute tension la pompe avant que celle-ci soit installe dans le systme et avant que toutes les brides dentres soient correctement assembles ou fermes.

Le fonctionnement de la pompe n'est optimis que si celle-ci est utilise avec l'une des units de contrle Agilent spcifiques (4UHV ou MiniVac).

ATTENTION! Lors de l'utilisation des pompes, le respect des normes de scurit est imprativement subordonn l'emploi des units de contrle Agilent.

La pompe VacIon peut tre installe dans toutes les positions. Par facilit elle est gnralement monte en position verticale avec bride dentre en partie haute, ou en position horizontale.

Les pompes peuvent galement tre suspendues dans toutes les positions laide de leur bride dentre.

Pour plus de dtails sur linstallation de la pompe, consulter lappendice Technical Information.

Procdure pour linstallation Utilisation

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Utilisation Toutes les instructions pour le fonctionnement correct de la pompe VacIon sont fournies dans la notice de l'unit de contrle.

Il est conseill de lire attentivement cette notice avant d'utiliser la pompe.

Des dpts hygroscopiques et labsorption dhydrogne dans le compos de titane peuvent provoquer, par effet du vieillissement de la pompe, lallongement du temps de dmarrage. Pendant lexposition lair, le dpt du compos de titane absorbe de la vapeur deau et cette action a pour consquence quau dmarrage suivant le chauffage de la pompe entranera la dispersion de la vapeur et dune partie de lhydrogne pompe prcdemment ce qui aura pour effet dallonger le temps de dmarrage.

3 Procdure pour linstallation Procdure dutilisation

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Procdure dutilisation Contrler que la polarit de lunit de contrle soit correcte pour la pompe.

Se reporter au manuel correspondant et observer la procdure suivante pour lutilisation de la pompe:

1 A laide dune pompe de pr-vide, porter le systme une pression de 1x10-4 mbar, mieux 10-5, ou infrieure.

2 Brancher lunit de contrle une source dalimentation approprie et lallumer.

3 Contrler la tension, le courant et la pression. Une valeur de courant proche du courant de court-circuit de lunit de contrle rvle lexistence dune fuite dans la pompe ou dans le systme. Au cours de la phase de dmarrage, un accroissement momentan de la pression de pr-vide est normal.

4 Laisser la soupape de pr-vide ouverte pendant le dmarrage de la pompe ionique tant quune pression de dmarrage approprie na pas t atteinte. Si la tension de la pompe ionique descend aprs la fermeture de la soupape, la rouvrir pour un pr-pompage supplmentaire. Ds que la pression diminue, la tension remonte et la soupape de pr-vide doit tre referme.

5 Lorsque lon porte la pompe la pression atmosphrique, utiliser de lazote sec de faon viter que les parois de la pompe nabsorbent de la vapeur aqueuse.

AVERTISSEMENT!

Lorsque la pompe est utilise pour le pompage de gaz toxiques, inflammables ou radioactifs, suivre les procdures appropries chaque gaz. Ne pas utiliser la pompe en prsence de gaz explosifs.

Procdure pour linstallation Maintenance

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AVERTISSEMENT!

Eviter de toucher la pompe pendant les oprations de chauffage et de refroidissement. La temprature leve peut provoquer des brlures.

ATTENTION! Ne pas approcher de dispositifs lectroniques de la pompe. Le champ magntique environnant cette dernire peut entraner des dysfonctionnements desdits dispositifs.

Maintenance Les pompes de la srie VacIon ne demandent aucun entretien. Toute intervention doit tre excute par un personnel agr.

AVERTISSEMENT!

Avant toute intervention sur la pompe, la dbrancher de la haute tension.

En cas de mise au rebut dune pompe, procder son limination dans le respect des normes nationales en vigueur.

3 Procdure pour linstallation Mise au rebut

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Mise au rebut Signification du logo "WEEE" imprim sur les tiquettes.

Le symbole ci-dessous est appliqu conformment la directive CE nomme "WEEE".

Ce symbole (uniquement valide pour les pays de la Communaut europenne) indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures mnagres ou les dchets industriels ordinaires, mais passer par un systme de collecte slective.

Aprs avoir vrifi les termes et conditions du contrat de vente, lutilisateur final est donc pri de contacter le fournisseur du dispositif, maison mre ou revendeur, pour mettre en uvre le processus de collecte et mise au rebut.

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4 Installation procedure General Information 40 Preparation for Installation 41 Installation 43 Use 45 Operating Procedure 46 Maintenance 47 Disposal 48 Original Instructions

4 Installation procedure General Information

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General Information This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment. Agilent will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards.

The VacIon series pumps are ion pumps commonly used to create ultra-high vacuum, due to their cleanliness, ability to pump different gases, and maintenance- and vibration-free operation.

The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment. Detailed information is supplied in the appendix "Technical Information".

This manual uses the following standard protocol:

WARNING!

The warning messages are for attracting the attention of the operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury.

CAUTION! The caution messages are displayed before procedures which, if not followed, could cause damage to the equipment.

NOTE The notes contain important information taken from the text.

Installation procedure Preparation for Installation

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Preparation for Installation The pump is supplied in a special protective packing. If this shows signs of damage which may have occurred during transport, contact your local sales office.

When unpacking the pump, be sure not to drop it and avoid any kind of sudden impact or shock vibration to it.

Do not dispose of the packing materials in an unauthorized manner. The material is 100 % recyclable and complies with EEC Directive 85/399.

CAUTION! In order to prevent outgassing problems, do not use bare hands to handle components which will be exposed to vacuum. Always use gloves or other appropriate protection.

NOTE Normal exposure to the environment cannot damage the pump. Nevertheless, it is advisable to keep it closed until it is installed in the system, thus preventing any form of pollution by dust.

4 Installation procedure Preparation for Installation

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Figure 1

Installation procedure Installation

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Installation Do not install or use the pump in an environment exposed to atmospheric agents (rain, snow, ice), dust, aggressive gases, or in explosive environments or those with a high fire risk. During operation, to obtain the declared functioning specification, the ambient temperature must be between 0 C and +85 C.

CAUTION! The pump should be kept sealed with its pinch-off tube until it is ready for attachment to the vacuum system.

Figure 2

NO!

4 Installation procedure Installation

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WARNING!

To avoid injury, never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off.

The pump operation is optimized using one of the special Agilent controllers (4UHV or MiniVac) only.

CAUTION! The safety specifications agreement using the pump is guaranteed using the Agilent controller only.

The VacIon pump can be installed in any position. For convenience, a pump is usually mounted vertically with the inlet up, or placed horizontally.

Pumps can be supported by the mounting flange in any position.

For detailed information about the pump installation, see the appendix Technical Information.

Installation procedure Use

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Use All the instructions for the correct use of the VacIon pumps are contained in the control unit manual.

Read the manual carefully before using the pump.

Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age. During exposure to air, the deposits of titanium compound absorb water vapor. In subsequent startups, pump heating causes release of the water vapor and some previously pumped hydrogen; thus, the starting time may be lengthened.

4 Installation procedure Operating Procedure

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Operating Procedure Check that the controller HV polarity is correct for the pump.

Refer to the relevant pump control unit instruction manual and follow the procedure below when operating the pump:

1 With a clean roughing pump, establish a roughing pressure of 1x10-4, better 10-5 mbar or lower in the vacuum system.

2 Plug the control unit into a suitable power source and switch the power ON.

3 Observe the voltage, current, and roughing pressure. A current value near the short-circuit current of the control unit could indicate that an unconfined flow discharge exists in the pump or system. A temporary rise in roughing pressure will usually be noticed during any starting procedure.

4 Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached. If the ion pump voltage drops after closing the roughing valves, reopen the valve for additional rough pumping. As the pressure decreases, the voltage again will rise, and the roughing valve should be closed.

5 When venting the pump, use dry nitrogen. This will avoid water vapor absorption on the pump walls.

WARNING!

When employing the pump for pumping toxic, flammable, or radioactive gases, please follow the required procedures for each gas disposal. Do not use the pump in the presence of explosive gases.

WARNING!

Do not touch the pump during the heating and cooling phases. The high temperature may cause serious damage.

Installation procedure Maintenance

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CAUTION! Do not put any electronic device near the pump since the magnetic field may cause a device malfunction.

Maintenance The VacIon series pump does not require any maintenance. Any work performed on the pump must be carried out by authorized personnel.

WARNING!

Before carrying out any work on the pump, disconnect it from the High Voltage supply.

If a pump is to be scrapped, it must be disposed of in accordance with the specific national standards.

4 Installation procedure Disposal

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Disposal Meaning of the "WEEE" logo found in labels.

The following symbol is applied in accordance with the EC WEEE (Waste Electrical and Electronic Equipment) Directive.

This symbol (valid only in countries of the European Community) indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system.

The end user is therefore invited to contact the supplier of the device, whether the Parent Company or a retailer, to initiate the collection and disposal process after checking the contractual terms and conditions of sale.

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5 Technical Information

Technical Information 49 Description of the VacIon Pump 50 Technical Specification 51 Outline Drawing 54 Stray Magnetic Field 55 VacIon Pump Installation 58 Inspection Procedure 58 Visual Inspection 58 Vacuum Evaluation 59 Short Circuits 60 Typical Installation 61 Inlet Flange Connection 62 Control Unit Connection 63 Pump Connection 64 Bakeout Operation 64 Pump Speed & Noble Gases 66 Maintenance 67 Troubleshooting/Maintenance 68 10 l/s VacIon Pump Replacement Parts and Accessories 70 10 l/s VacIon Pump Controllers 71 Original Instructions

5 Technical Information Description of the VacIon Pump

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Description of the VacIon Pump The Agilent 10 l/s VacIon pump is an ion pump and operates in the pressure range from 10-4 to below 10-11 mbar.

The 10 l/s VacIon pump is housed in one compact package that virtually eliminates any stray magnetic field. The specifications make this pump ideal for general research, scanning electron microscopy, mass spectrometer pumping, and tube processing applications.

The standard 10 l/s VacIon pump consists of:

pump body with support brackets: model 919-5005

magnet package: model 911-0030.

The following figure shows the 10 l/s VacIon pump.

Figure 310 l/s VacIon pump

Technical Information Technical Specification

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Technical Specification The following table details the main technical specifications of the 10 l/s VacIon pump.

Tab. 1

Specification Value Nominal pumping speed for Nitrogen (l/s) 10 Operating life at 1x10-6 mbar (hours) 40,000 Maximum operating voltage (Vdc) +7000 Maximum starting pressure (mbar) 1x10-4 Ultimate pressure (mbar) Below 10-11 Inlet flange Rotatable 2.75 (NW 35) OD

ConFlat flange Internal volume (litres) 0.4 Maximum baking temperature (C) 350 Temperature limits (C): Pump Magnet

400 300

Material: Body Magnet

304 stainless steel Ferrite

Weight without magnet, lbs (kg) 9 (4)

5 Technical Information Technical Specification

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The following figure shows the typical pressure versus current diagram.

Figure 4Typical pressure vs. current diagram

Technical Information Technical Specification

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Figure 5Typical pumping speed curve S(p)

0

2

4

6

8

10

12

1,E-09 1,E-08 1,E-07 1,E-06 1,E-05 1,E-04

S (l/

s)

p (mbar)

3 kV 5 kV 7 kV

5 Technical Information Outline Drawing

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Outline Drawing The following figure shows the outline drawing for the 10 l/s VacIon pump.

Figure 610 l/s VacIon pump outline drawing

Technical Information Stray Magnetic Field

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Stray Magnetic Field Magnetic field data for the 10 l/s VacIon pump and magnet package are provided in the plots below.

The following data are presented:

1. Magnetic field in gap of horseshoe and confined field magnets

2. 10 l/s pump magnet field free region

3. Magnetic field on pump flange axis

4. Magnetic field at flat of pump magnet package

Figure 7Magnetic field in gap of horseshoe and confined field magnets

5 Technical Information Stray Magnetic Field

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Figure 810 l/s pump magnet field free region

Figure 9Magnetic field on pump flange axis

Technical Information Stray Magnetic Field

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Figure 10Magnetic field at flat of pump magnet package

5 Technical Information VacIon Pump Installation

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VacIon Pump Installation

Inspection Procedure VacIon pumps are evacuated, baked out, sealed and leak-checked at below 1x10-8 mbar prior shipping.

The following information and procedures can be used to establish the vacuum integrity of a VacIon pump before installation.

Visual Inspection Inspect the pump and magnet for physical damage which may have occurred during shipment. Examine, in particular, the brazed joints on the high voltage feedthrough.

Inspect the pinch-off seal. If it is open, the pump is at atmospheric pressure.

WARNING!

The pinch-off seal is extremely sharp. Be careful.

A VacIon pump that has been exposed to atmosphere during shipment, or while in storage, will operate properly if it has otherwise not been damaged.

The pump is not harmed by such exposure, although it is good practice to keep it under vacuum when not in use to exclude dust and the accumulation of water vapor from the environment.

Technical Information VacIon Pump Installation

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Vacuum Evaluation To determine the vacuum level of the new pump before air releasing it:

1 Connect the pump to the control unit as directed in the instruction manual of the control unit.

WARNING!

The high voltage which is present in the ion pump when it is powered from the power unit can cause severe injury or death. Be sure the garter spring is mounted on the high voltage feed through because the ground connection is brought from the control unit to the pump body through the garter spring. An additional safety ground connection for the pump body is made through the fixing screws of the H.V. cable connector.

2 With the main power switch in the OFF position, plug the control unit into a suitable power source.

3 Turn the power to ON.

4 Observe the reading for an indication of one of the following conditions:

a If the pump is free of leaks and is at a low pressure, the pressure indication shall quickly fall to or below the 10-8 mbar range as the volume of gas is pumped.

b If the pressure inside the pump is at or near atmospheric level, an arc may strike inside the high voltage feedthrough giving a popping sound and the pump current will fluctuate. If this occurs, turn the power OFF immediately.

5 If the vacuum integrity has been lost, the pump should be leak- checked with a mass spectrometer leak detector before installation on the system.

6 With the control unit disconnected, break the pinch-off seal on the copper tubulation with pliers, diagonal cutters or a prick punch. The sound of inrushing air indicates a well-sealed pump.

5 Technical Information VacIon Pump Installation

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CAUTION! Do not open the pinch off-seal with a saw or grinder. These methods will cause metal particles to be drawn into the pump by the inrushing air as the pump is opened.

NOTE To prevent water vapour or dust particles from entering the pump, leave the pinch-off tubulation (tube flange assembly) sealed until ready to attach the pump to the vacuum system.

Short Circuits If there is a short circuit between the anode and cathodes in the pump, the short-circuit current of the control unit will be drawn and zero voltage will be indicated. If a short circuit exists in the control unit or high voltage cable and connector, zero voltage will also be observed when the high voltage connector is disconnected from the pump (refer to the control unit manuals).

Technical Information Typical Installation

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Typical Installation A typical installation is shown in the following figure and consists of:

1. VacIon pump.

2. A valve to seal off the pump from the rest of the system (if required).

3. The control unit.

4. A clean roughing pump (i.e. turbo or sorption).

5. A thermocouple gauge capable of indicating pressure from atmosphere to 10-3 mbar range.

6. A valve to seal off the roughing pump from the vacuum chamber. Roughing lines are usually made of stainless steel or copper tubing, or other low vapor pressure material.

7. High voltage cable.

8. Backing pump.

Figure 11Typical installation

5 Technical Information Inlet Flange Connection

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Inlet Flange Connection The VacIon pump can be installed with any orientation.

For convenience, a pump is usually mounted vertically with the inlet up, or placed horizontally.

Pumps can be supported by the mounting flange in the vertical position.

When mounted horizontally, or when transported, all pumps should be supported.

The pump should be mounted to fulfill two space requirements.

First, a minimum of clearance is necessary for the removal of the high voltage connector.

Second, the effect of the pump fringing magnetic field should be considered.

The stray field is lowest along a line passing through the magnet assembly in the long direction. If magnetic shielding is necessary, place the shield around the experiment itself. Refer to specifications for stray magnetic field data.

To avoid accumulation of dust and other particles or foreign material, the pump should be kept sealed with its pinch-off tubulation until it is ready for attachment to the vacuum system.

When ready to install the pump, unscrew the main flange bolts and lift the blank flange with the help of a bolt screwed into the available threaded hole. If the pump is equipped with a rotatable flange, support the lower part of the flange with a piece of wood placed between flange and pump body.

NOTE Some particles of copper oxide may adhere to the outer edge of the flange gasket. Be careful not to allow them or any other foreign materials to fall into the pump.

Connect the pump to the system with tubing of the largest practical diameter. This tubing should be as short as possible to avoid a large pressure differential between the VacIon pump and the system.

Technical Information Control Unit Connection

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Then proceed as follows:

1 Inspect the mating flanges for cleanliness and large scratches or nicks.

2 Use a new gasket each time the flanges are reassembled.

3 Use washers with all flanges except 2.75" o.d. flanges. Use type 300-series stainless steel screws, nuts, and washers for the required strength and thermal expansion.

4 Use silver-plated screws or apply high-temperature lubricant to the screw threads that extend through the flange and between the nuts and flange. Proper lubrication facilitates tightening and disassembly. A recommended lubricant for use on the outside of pumps is Fel-Pro C-100.

NOTE Lubrication is essential to prevent galling of the nut and screw after bakeout.

5 Attach the nuts and tighten each one to 6 11 Nm (4.5 - 8 ft.-lbs) of torque. This will partially close the gap between the flange faces.

6 Repeat the sequential tightening for two more cycles.

7 Continue tightening the bolts until the flange faces meet and a pronounced increase in torque is felt.

Control Unit Connection An Agilent VacIon pump control unit is recommended for use with all pump sizes.

WARNING!

Before connecting the equipment to the power source, an earth ground should be connected to the control unit's ground bar, and a connection with the VacIon pump must be established.

5 Technical Information Pump Connection

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Pump Connection

WARNING!

Never apply power until you have checked and verified that proper grounding has been achieved (refer to the relevant ion pump control unit instruction manual).

The pump is connected to the control unit by a co-axial high voltage cable assembly as follows:

1 Check that the unit's main power switch is OFF.

2 Where applicable, ground the pump body to the control unit by fastening the braided ground lead from the control unit to the pump body.

3 Position the "grounding spring" on the pump voltage feedthrough in the recess between the ceramic and the weld sleeve.

4 Push the cable connector over the high voltage feedthrough.

5 Always twist the connector until the cable connector slides over the grounding spring and goes no further.

6 Where a connector bracket is installed, tighten the screw.

WARNING!

Before disconnecting the high voltage connector from the pump, wait at least 30 seconds after turning off the high voltage to allow the capacitors to discharge completely.

Bakeout Operation When a VacIon pump does not reach the desired ultimate pressure, and there are no leaks, it is necessary to bake the system to remove water vapour. This is done by heating the pump and all the components in the system.

Technical Information Bakeout Operation

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1 Heat the pump body and the system with a bakeout oven unit or heating strips to temperatures between 150 C and 220 C (220 C is the maximum allowable for most bakeable high voltage cables). This temperature is high enough to degas the pump surfaces of water vapour without damaging the magnet and high voltage connector. Note that the system components must be compatible with the bakeout temperature. The heating must be approximately even on all vacuum surfaces or water vapour can re-condense on the cooler surfaces preventing of UHV vacuum pressures.

2 Leave the pump control unit on and monitor the pressure. It must never increase above 5x10-5 mbar; if this value is exceeded, turn the bakeout off and then on again when low pressure is restored. To control the heaters and to monitor to high pressure limit during bakeout in automatic mode, a pressure- sensitive relay may be used.

3 Bake the VacIon pump for at least eight hours. Longer bakeout periods are recommended when the pump has been used with heavy gas load or when UHV pressure, 10-9 mbar or less is desired.

4 As the pump and system cool down to room temperature, a drop in pressure should be observed.

5 Technical Information Pump Speed & Noble Gases

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Pump Speed & Noble Gases Pumping speed varies with pressure and with different gases.

Virtually all gases and vapours can be pumped without stopping the pumping action in VacIon pumps. The sputtering action of the pump removes contaminants and continues to provide fresh titanium for pumping. An inert gas load in a vacuum system is typically only "volume gas" - inert gas absorption to surfaces of the system is negligible. Thus, the need for long-term inert gas pumping only occurs when argon or air is introduced continuously into the system or if a large leak exists (argon is 1 % of atmospheric air). Diode pumps have normally a low pumping speed for inert gases typically 2 3% of their nominal pumping speed. Instability, cyclical pressure increases, typically occur after pumping inert gas amount equal to pure inert gas for 20 h at 10-6 mbar.

NOTE This pump is designed to have a higher pumping speed (~ 20%) for inert gases, but it is still a diode design. Therefore instability occurs after shorter time as the critical amount of gas is pumped away faster.

Technical Information Maintenance

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Maintenance

WARNING!

The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death. Before mounting the high voltage connector of the cable on the pump high voltage feedthrough, or before removing it, be sure the main power is removed from the control unit. Before removing the high voltage connector of the cable from the control unit, be sure the main power is removed from the control unit. Wait at least 10 seconds after removing the main power from the control unit, to allow capacitors to discharge completely.

VacIon pumps are maintenance free. In case of life time expiry or accidental premature failure of the pump, please contact your nearest Agilent sales/service office for repair.

5 Technical Information Maintenance

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Troubleshooting/Maintenance The need for appropriate maintenance is indicated by one or more of the following conditions:

1 Pump current fluctuation, internal electrical shorts, or pressure bursts. These are usually caused by titanium compounds flaking from surfaces as the pump accumulates operating time.

2 Slow starting. The pump may require more time to start after exposure to air compared to starting times experienced when the pump was new, even though a good roughing system with high pumping speed for water vapour is used. Assuming that the vacuum system has not been contaminated, this condition is usually caused by water vapour absorbed on the surface area inside the pump. An increase of surface area is caused by titanium compound deposits, which are hygroscopic. Care should be taken to thoroughly remove cleaning solvents from the high voltage feedthrough well and other areas that could trap the solvents.

3 Slow pump-down. This condition can be caused by foreign material in the system or pump. An example is molecular sieve material from a trap or a sorption pump drawn into the vacuum system by accidental opening of the roughing valve at high pressure. This will cause molecular sieve particles to be deposited throughout the pump and vacuum system. Slow pump-down caused by a leak can be quickly recognized because the pressure will reach and maintain a constant level. Most outgassing phenomena decrease with pumping time, although sometimes slowly.

4 Hydrogen saturation of sputter-cathode grids. Pumping hydrogen at a true pressure of 1x10-5 mbar for about 1500 hours will saturate the sputter-cathode grids. The time for saturation decreases rapidly at true pressures above 1x10-5 mbar. (It is important to note that the pressure indicated by the pump current or shown on an ionization gauge calibrated for nitrogen must be multiplied by 2.2 to obtain the true pressure of hydrogen.) In the event of hydrogen saturation of the cathode grids, replace the pump element. It is possible to achieve some regeneration by baking for at least 24 hours.

Technical Information Maintenance

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5 Cathode erosion. The cathode adjacent to each anode cell may become extremely eroded after the pump element has been used for a long time. Replace the sputter cathodes of a triode pump when one or more titanium vanes are nearly eroded through at the centres of the anode cells.

6 Short circuit across insulators. Short circuits may result from flakes or foreign materials. Continuous arcs can melt sputter shields and coat the ceramic insulators. Inspect insulator surfaces and sputter shields. Remove foreign materials as necessary. On pumps that do not have removable elements, tap the pump firmly to dislodge flakes that may be causing the short circuit.

7 Field emission current. A background (leakage) pump current is often caused by field emission which reduces the accuracy of using the pump current as a pressure indicator.

Check the VacIon leakage currents as follows:

a) Turn off the pump control unit.

b) Remove the pump magnet(s).

c) Connect and turn on the pump control unit and wait for current stabilization. Meter must indicate less than 1 mA. Make sure that the control unit and high voltage cable leakage current is negligible. If leakage currents come from the pump, perform the "hi- potting" by applying 10 to 12 kV (ac) at a current of 30 to 50 milliamperes for less than 1 minute. This power will burn off all sharp edges which are sources of the leakage currents.

WARNING!

Voltages developed in the high-potter power supply are potentially lethal. Use caution during operation and ensure correct grounding connection.

e) Check the pump leakage currents and install the magnet.

5 Technical Information 10 l/s VacIon Pump Replacement Parts and Accessories

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10 l/s VacIon Pump Replacement Parts and Accessories Tab. 2

Part number 10 l/s VacIon pump, processed, w/ 2-3/4" flange 919-5005 Magnet assembly for 10 l/s VacIon pump 911-030

Cables HV Bakeable cable, 13' (4 m), straight, FISCHER-HV 929-0712 10' (3 m) cable with right angle connector, KING-HV 924-0741

For a complete overview of Agilent's extensive vacuum product line, please refer to the Agilent Vacuum Catalogue.

Technical Information 10 l/s VacIon Pump Controllers

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10 l/s VacIon Pump Controllers Tab. 3

Controller model Part number MiniVac 120 Vac, KING-HV

220 Vac, KING-HV 24 Vdc, KING-HV

929-0190 929-0291 929-0197

MiniVac 120 Vac, FISCHER-HV 220 Vac, FISCHER-HV 24 Vdc, FISCHER-HV

929-0191 929-0290 929-0196

4UHV 1 x 120W positive 1 x 200W positive 2 x 80 W positive 4 x 80 W positive

929-9101 929-9011 929-9201 929-9401

19 rack adapter for MiniVac 969-9191 19 rack adapter for 4UHV 929-0064

Please refer to the Agilent Vacuum Catalogue to choose the correct controller.

Request for Return Form Sales and Service Offices

United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington, MA 02421 - USA Tel.: +1 781 861 7200 Fax: +1 781 860 5437 Toll-Free: +1 800 882 7426

India Agilent Technologies India Pvt. Ltd. Vacuum Product Division G01. Prime corporate Park, 230/231, Sahar Road, Opp. Blue Dart Centre, Andheri (East), Mumbai 400 099.India Tel: +91 22 30648287/8200 Fax: +91 22 30648250 Toll Free: 1800 113037

Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201, Level 2 uptown 2, 2 Jalan SS21/37, Damansara Uptown 47400 Petaling Jaya, Selangor, Malaysia Tel : +603 7712 6106 Fax: +603 6733 8121

Benelux Agilent Technologies Netherlands B.V. Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel.: +31 118 671570 Fax: +31 118 671569 Toll-Free: 00 800 234 234 00

Italy Agilent Technologies Italia S.p.A. Vacuum Products Division Via F.lli Varian 54 10040 Leini, (Torino) - Italy Tel.: +39 011 997 9111 Fax: +39 011 997 9350 Toll-Free: 00 800 234 234 00

Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division (3F) 20 Kao-Shuang Rd., Pin-Chen City, 32450 Taoyuan Hsien , Taiwan, R.O.C. Tel. +886 34959281 Toll Free: 0800 051 342

Canada Central coordination through: Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington, MA 02421 - USA Tel.: +1 781 861 7200 Fax: +1 781 860 5437 Toll-Free: +1 800 882 7426

Japan Agilent Technologies Japan, Ltd. Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4-16-36 Shibaura Minato-ku Tokyo 108-0023 - Japan Tel.: +81 3 5232 1253 Fax: +81 3 5232 1710 Toll-Free: 0120 655 040

UK and Ireland Agilent Technologies UK, Ltd. Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton, Oxford OX5 1QU UK Tel.: +44 (0) 1865 291570 Fax: +44 (0) 1865 291571 Toll free: 00 800 234 234 00

China Agilent Technologies (China) Co. Ltd Vacuum Products Division No.3, Wang Jing Bei Lu, Chao Yang District Beijing, 100102, China Tel: +86 (0)10 64397888 Fax: +86 (0)10 64391318 Toll free: 800 820 3278

Korea Agilent Technologies Korea, Ltd. Vacuum Products Division Shinsa 2nd Bldg. 2F 966-5 Daechi-dong Kangnam-gu, Seoul Korea 135-280 Tel: +82 (0)2 3452 2455 Fax: +82 (0)2 3452 3947 Toll free: 080 222 2452

Other Countries Agilent Technologies Italia S.p.A. Vacuum Products Division Via F.lli Varian 54 10040 Leini, (Torino) - Italy Tel.: +39 011 997 9111 Fax: +39 011 997 9350 Toll-Free: 00 800 234 234 00

France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z.A. de Courtaboeuf - B.P. 12 91941 Les Ulis cedex - France Tel.: +33 (0) 1 69 86 38 84 Fax: +33 (0) 1 69 86 29 88 Toll free: 00 800 234 234 00

Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C.P. 03100 Mexico, D.F. Tel.: +52 5 523 9465 Fax: +52 5 523 9472

Customer Support & Service NORTH AMERICA: Toll Free: 800 882 7426, Option 3 vpl-ra@agilent.com EUROPE: Toll Free: 00 800 234 234 00 vpt-customercare@agilent.com PACIFIC RIM: please visit our website for individual office information http://www.agilent.com Worldwide Web Site, Catalog and Order On-line: www.agilent.com Representative in most countries

Germany and Austria Agilent Technologies Sales & Services GmbH & Co. KG Vacuum Products Division Lyoner Str. 20 60 528 Frankfurt am Main GERMANY Tel: +49 69 6773 43 2230 Fax: +49 69 6773 43 2250

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